Rca Inc.

James John DiPiazza

Thomas R Pampalone

Ahmad H Khan

A multilayer, photoresist recording medium is disclosed which comprises an absorptive layer and an oxygen plasma-resistant photoresist layer thereover. The structure is substantially free of intermixing of the two layers and separation of the photoresist layer during processing. The absorptive layer is formed by a two-step curing of a composition comprising a solution of a multifunctional acrylate or methacrylate monomer, a suitable dye and a photoinitiator in a suitable solvent. A coating of this composition is rapidly solidified to form an absorptive layer by high intensity irradiation and then baked to remove residual solvent and assure complete polymerization of the monomer.

Process of using absorptive layer in optical lithography with overlying

A light absorbing medium is interposed between a photosensitive layer, such as a photoresist layer, and the surface upon which the photosensitive layer is to be applied in order to eliminate surface effects which result from the reflection of light which passes through the photosensitive layer and is then reflected upward from the surface back into the photosensitive layer. The light absorbing medium may be either a quarter-wave plate or a filter chosen to absorb light of the energy spectrum to which the photosensitive layer is sensitive.

Nonreflecting photoresist process

A high resolution fluorescent screen including an amorphous coating of fluorescent dye on a substrate transparent to visible light is used to enable an observer to examine photomasks of the type used in manufacturing integrated circuits by using ultraviolet light. The screen converts ultraviolet light passing through the photomask into visible light. The screen is comprised of a transparent substrate having a high resolution amorphous coating of fluorescent dye in a binder on one side. Alternatively, a transparent substrate including a fluorescent material, such as uranium glass, may be used. On the other side of the substrate an ultraviolet blocking filter is applied to prevent ultraviolet light from injuring the eye of an observer using the screen.

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Burlington County, NJ, United States of America

James John DiPiazza