Eaton Corporation

Nippon Telegraph and Telephone Corporation

James E Hipple

Masaru Shimada

Gerald L Dionne

Iwao Watanabe

Yasuhiro Torii

An electron cyclotron resonance ion source for an ion implanter. The source includes an ionization chamber surrounded along its length by an electromagnet. A number of extraction electrodes at an output end of the ionization chamber allow positively charged oxygen ions to pass through apertures in the electrodes. The uniformity of the axially aligned magnetic field in the ionization chamber is extended through the extraction electrode by a magnetically permeable electrode and through use of non-magnetically permeable material to mount others of said electrodes.

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Lexington, MA, United States of America

James E Hipple