Carl Zeiss Microscopy Gmbh

Jakob Haarstrich

Jörg Siebenmorgen

Thomas Kalkbrenner

Mirko Liedtke

Nils Langholz

Helge Eggert

Martin Beck

Andreas Möbius

The invention relates to a method for determining the thickness and refractive index of a layer () on a substrate (). The layer () having a layer boundary surface () facing the substrate () and a layer top side () facing away from the substrate (). In said method, the following steps are performed; imaging the layer (), by confocal microscopy, along an optical axis (), determining a point spread function resolved along the optical axis () al the layer boundary surface () and the layer lop side (), determining an apparent thickness of the layer at a lateral point of the layer from the distance between two maxima of the point spread function, determining the widening of a maximum that the point spread function has at the layer boundary surface () relative to the width of the same maximum that the point spread function has at the layer top side (), at the lateral point, and determining the thickness and refractive index of the layer () at the lateral point from the apparent thickness and the widening.

Method for determining the thickness and refractive index of a layer using a shape feature during analysis

A method is useful for generating an overview image using a high-aperture objective. An optical detection beam path with the objective is provided. The path is transferred into a second operating state via a first depth of field increased to a second depth of field. Detection radiation is captured in the second operating state. Detection radiation coming from the sample space is collected by the objective, guided along the path, and captured by a detector sensitive to detection radiation as an image with a lateral image field, which is the same in the first and second operating states.

Method for generating an overview image using a large aperture objective

The invention relates to an illumination apparatus for a microscope, a microscope and a method for operating the illumination apparatus. The illumination apparatus has a sample space for holding a sample that is to be illuminated, and at least one laser light source. An objective for the directional emission of laser radiation of a first wavelength along a first optical axis that is directed into the sample space, and with a cover of the sample space by which the sample space is delimited at least on one of its sides. The cover further has a layer that is either impenetrable for the laser radiation over a blocking angle range of the illumination angle and is transmissive for radiation of a second wavelength over a transmitted light angle range, or has a controllable layer that, in a first control state, is transparent for radiation of the second wavelength and, in a second control state, is impenetrable for the laser radiation of the first wavelength.

Illumination apparatus for a microscope, method for operating it, and microscope having an illumination apparatus

A method and arrangement for acquiring image data, wherein a pixel area of a specimen to be imaged is illuminated in a plurality of illumination events with illumination light of a respective selected intensity, which intensities are different from one another. Subsequently, detection light emanating from the respective pixel area is acquired for each of the intensities as image data of a subpixel and resulting image data of the pixel area are determined from the number of acquired image data of the subpixels. According to the invention, the illumination events are triggered successively. The image data of all subpixels of the pixel area are acquired before a further pixel area is illuminated.

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Jena, Germany

Jakob Haarstrich