Samsung Electronics Co., Ltd.

Samsung Electro-mechanics Co., Ltd.

Postech Academy-industry Foundation

Jae-hee Kim

Chan Soo Hwang

Jong-hyuk Kim

Soon-mok Ha

Wee-sang Park

Dong-Hyun Lee

Bo-un Yoon

Kyung-Ho Park

Se-Hyun Park

In-seak Hwang

Byoung-ho Kwon

Yong-Woo Kim

Yong-eil Kim

Yong-wook Lee

Hye-sung Park

Jong-hyuk Park

Soon Mok Ha

Myung-jae Jang

Sung-jin Muhn

Dae-woong Woo

A photomask for negative-tone development (NTD) includes a main region, and a scribe lane region surrounding the main region and including a first lane and a second lane. The first and the second lane is provided at first opposite sides of each other with respect to the main region. The first lane includes a first sub-lane extending in a first direction and a second sub-lane that extending in the first direction. The first sub-lane includes a first dummy pattern and the second sub-lane includes a second dummy pattern. The first dummy pattern and the second dummy pattern are configured to radiate light exceeding a threshold dose of light to a first portion of a negative-tone photoresist provided under the first lane of the photomask.

Photomask for negative-tone development

A method for fabricating a phase shift mask includes preparing a transmissive substrate on which a first mask region and a second mask region surrounding the first mask region are defined. In the first mask region, main patterns are formed having a first pitch in a first direction and a second direction perpendicular to the first direction. Each of the main patterns has a first area. In at least one row, assist patterns are formed at the first pitch to surround the main patterns. Each of the assist patterns has a second area less than the first area. In the second mask region, dummy patterns are formed in a plurality of rows. The dummy patterns surround the assist patterns at the first pitch. Each of the dummy patterns has a third area greater than the first area.

Semiconductor device

A method of forming a micro-pattern including forming a mold layer and a supporting material layer on a substrate, patterning the mold layer and the supporting material layer to form recess patterns, forming conductor patterns in the recess patterns, removing a portion of an upper portion of the supporting material layer for causing upper portions of the conductor patterns to protrude, forming a block copolymer layer on the supporting material layer, processing the block copolymer layer to phase-separate the block copolymer layer into a plurality of block parts, selectively removing some of the phase-separated plurality of block parts, and removing the supporting material layer to expose the mold layer at a position corresponding to each of the removed block parts may be provided.

Micro-pattern forming method, capacitor and method of manufacturing the same, semiconductor device and method of manufacturing the same, and electronic system including semiconductor device

Method of fabricating phase shift mask and method of fabricating semiconductor device

A method of manufacturing a semiconductor device includes: preparing a wafer in which a first cell area and a second cell area are defined; forming a bottom electrode structure in the first cell area and a dummy structure located in the second cell area; and sequentially forming a dielectric layer and a top electrode on the bottom electrode structure and the dummy structure, wherein the bottom electrode structure includes a plurality of bottom electrodes extending in a first direction in the first cell area and first and second supporters to support the plurality of bottom electrodes, wherein the dummy structure includes a first mold film, a first supporter film, a second mold film, and a second supporter film that are sequentially formed to cover the second cell area, and the second supporter and the second supporter film are at a same level relative to the wafer.

Semiconductor device and method of manufacturing the same

An apparatus for transmitting power wirelessly is provided. The apparatus comprises: a dielectric resonator which generates evanescent waves in a predetermined direction in order to transmit power; and a loop antenna which is coupled to a surface of the dielectric resonator and supplies power to the dielectric resonator. The dielectric resonator transmits power by means of evanescent waves generated in directions perpendicular to top and bottom surfaces of the dielectric resonator and by radiation in directions parallel to the top and bottom surfaces of the dielectric resonator. Accordingly, efficient power transmission over short and long distance ranges is possible.

Apparatus and system for transmitting power wirelessly

A mobile terminal and a mobile terminal antenna reduce the intensity of electromagnetic waves radiated in the direction of a human body. The mobile terminal antenna includes a radiator, which radiates electromagnetic waves; a ground which is connected with the radiator, and a radiation preventer which has a metallic bar on one side of the ground in parallel with the ground at an interval. Accordingly, the electromagnetic radiation exposure to the human body can be reduced by altering the radiation emission pattern, while the performance of the antenna can be simultaneously enhanced.

Mobile terminal and mobile terminal antenna for reducing electromagnetic waves radiated towards human body

Growing community of inventors

Yongin-si, South Korea

Jae-hee Kim