Kla Tencor Corporation

Novellus Systems Incorporated

J Kirkwood H Rough

Yehiel Gotkis

David Lee Brown

Kirk Joseph Bertsche

David Aitan Soltz

George H Zapalac, Jr

Eliot K Broadbent

Jeffrey A Tobin

Jeffrey C Benzing

A method of inline inspection of photovoltaic material for electrical anomalies. A first electrical connection is formed to a first surface of the photovoltaic material, and a second electrical connection is formed to an opposing second surface of the photovoltaic material. A localized current is induced in the photovoltaic material and properties of the localized current in the photovoltaic material are sensed using the first and second electrical connections. The properties of the sensed localized current are analyzed to detect the electrical anomalies in the photovoltaic material.

Inline inspection of photovoltaics for electrical defects

An induction plasma source for integrated circuit fabrication includes an induction coil which defines a generally convex surface. The convex surface may be in the form of a spherical section less than a hemisphere, a paraboloid, or some other smooth convex surface. The windings of the induction coil may be spaced at different intervals in different sections of the coil and may be in multiple layers in at least a portion of the coil. Varying the shape of the coil and the distribution of the coil windings allows the plasma to be shaped in a desired manner.

Plasma process apparatus for integrated circuit fabrication having dome-shaped induction coil

Growing community of inventors

San Jose, CA, United States of America

J Kirkwood H Rough