View Engineering, Inc.

Kaijo Denki Co. Ltd.

Iwami Uramoto

Takashi Kamiharako

Ralph M Weisner

Valerie A Liudzius

A semiconductor device inspection system capable of objectively accomplishing visual image inspection of a semiconductor device and minimizing error in the inspection, to thereby effectively carry out the inspection with high accuracy and at high speed. The system includes a low magnification image pickup mechanism which consists of a plurality of low magnification image pickup units each carrying out low magnification image pickup of a semiconductor device to generate an image signal. The system also includes a signal processing system for processing the image signal to judge the correctness of the semiconductor device. In the image pickup units, their light receptors are each arranged in parallel to an inspected surface of the semiconductor device and their central axes intersect together on the inspected surface. The system may also include a high magnification image pickup unit consisting of a high magnification image pickup mechanism and a light-permeable element retractably positioned between the unit and a semiconductor device to be inspected.

Growing community of inventors

Tokyo, Japan

Iwami Uramoto