Rave N.p., Inc.

Bruker Nano Gmbh

Ivin Varghese

Mehdi Balooch

Charles W Bowers

Gordon Scott Swanson

A substrate dry cleaning apparatus, a substrate dry cleaning system, and a method of cleaning a substrate are disclosed. The substrate dry cleaning system includes a substrate support and a reactive species generator. The reactive species generator includes a first conduit defining a first flow channel that extends to an outlet of the first conduit, the outlet of the first conduit facing the substrate support, a first electrode, a second electrode facing the first electrode, the first flow channel disposed between the first electrode and the second electrode, a first inert wall disposed between the first electrode and the first flow channel, and a second inert wall disposed between the second electrode and the first flow channel.

Contamination removal apparatus and method

A nozzle for providing carbon dioxide for cleaning is disclosed. The nozzle includes a reservoir for receiving liquid carbon dioxide, a barrel defining a passageway therethrough, the passageway extending to an outlet of the barrel, an orifice effecting fluid communication between the reservoir and the passageway, and a screen member constructed and arranged for interrupting flow of the carbon dioxide pellets greater than a select size from being emitted from the passageway of the barrel. Liquid carbon dioxide flows through the orifice to phase transfer into gaseous carbon dioxide and carbon dioxide pellets in the passageway. An internal diameter of the passageway is smaller than an internal diameter of the reservoir.

[object Object]

A nozzle and method of providing COfor cleaning includes providing a COflow; phase transferring the COflow into gaseous COand COpellets; interrupting the COflow with a screen member; retaining the COpellets of a select larger size upstream of the screen member; permitting the COpellets of a select smaller size to pass through the screen member for cleaning.

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Livermore, CA, United States of America

Ivin Varghese