The Carborundum Company

Irving B Ruppel, Jr

Michael A Tenhover

Robert C Ruhl

James L Eucker

Dean P Owens

William J Keese

The invention provides a silicon carbide sputtering target comprising non-stoichiometric silicon carbide, SiC.sub.x, where x is the molar ratio of carbon to silicon and x is greater than about 1.1 but less than about 1.45. The sputtering target of this invention is superior to sputtering targets prepared from presently available non-stoichiometric silicon carbide in that the DC magnetron sputtering rate using the new sputtering target is nearly an order of magnitude higher than the rate achievable with presently available targets. The invention also includes processes for making the new sputtering target and preparing superior silicon carbide films by sputtering the target.

Method of coating a substrate with a SiC.sub.x film

Substrates are disclosed having an ultra-smooth surface finish thereon rendering them useful in making high density magnetic storage components, such as a computer hard disk or thin-film head which can read and/or write data on such disks. The substrates are comprised of a non-oxide ceramic base which is coated with a smoothing layer comprised of amorphous, non-stoichiometric silicon carbide corresponding to the formula SiC.sub.x, wherein x is the molar ratio of carbon to silicon and is greater than 1. Also disclosed are processes for making the substrates and components.

Ceramic substrates and magnetic data storage components prepared

Ceramic substrate with silicon carbide smoothing layer

Silicon carbide sintered bodies having controlled porosity in the range of about 3-25 vol % are prepared from raw batches containing a multimodal distribution of silicon carbide particles and comprised of at least a first set of particles having one average grain size and a second set of particles having another average grain size larger than the first set of particles. The resulting pores are 3-5 microns in the largest dimension, with an aspect ratio between about 1/1 and about 3/1 . The porous bodies, e.g., in the form of mechanical seal members, exhibit good tribological properties.

Porous silicon carbide

Ceramic tubes are manufactured from a mixture that includes ceramic powder. The mixture is extruded through a die to form a tube. The tube is passed through an open-ended dryer, calciner, transition zone, sintering furnace, and cooler. Thereafter, the tube is cut to the desired length (which may be very long). The quality of the tube is enhanced by applying a vacuum to the mixture prior to extrusion. For tubes made of non-oxide ceramics, an inert atmosphere is maintained both inside and outside the tube in all sections of the equipment that operate above 200.degree. C. A controlled tension is applied to the tube by means of first pinch rolls disposed downstream of the dryer and second pinch rolls disposed downstream of the cooler.

Process for manufacturing ceramic tubes

Apparatus for making ceramic tubes from a mixture that includes ceramic powder. The mixture is extruded through a die to form a tube. The tube is passed through an open-ended dryer, calciner, transition zone, sintering furnace, and cooler. Thereafter, the tube is cut to the desired length (which may be very long). The quality of the tube is enhanced by applying a vacuum to the mixture prior to extrusion. For tubes made of non-oxide ceramics, an inert atmosphere is maintained both inside and outside the tube in all sections of the equipment that operate above 200.degree. C. A controlled tension is applied to the tube by means of first pinch rolls disposed downstream of the dryer and second pinch rolls disposed downstream of the cooler.

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Kenmore, NY, United States of America

Irving B Ruppel, Jr