Schlumberger Technologies, Inc.

Ira Rosenberg

Neal T Sullivan

Paul J Duval

Vladimir Vayner

John Rouse

Allan I Rubin

In order to improve the resolution of an electron beam in a scanning electron microscope or the like in which a Wien filter is employed for particle detection purposes, the beam is caused to have an envelope with a crossover point within, and preferably centrally located with respect to, the Wien filter.

Reduction of aberrations produced by Wien filter in a scanning electron microscope and the like

A charged particle filter such as a Wien filter in which components used as the pole pieces and electrodes are precisely and reliably secured to a supporting structure through which they extend and to which they are brazed. Electrical insulating gaps in the magnetic circuit are located very remotely from the pole faces of the pole pieces so as to minimize any adverse effect of the gaps on the produced magnetic field.

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Andover, MA, United States of America

Ira Rosenberg