Cypress Semiconductor Corporation

Sandisk 3d LLC

Matrix Semiconductor, Inc.

Longitude Flash Memory Solutions Ltd.

Sandisk Technologies Inc.

Igor G Kouznetsov

Venkatraman Prabhakar

Bogdan I Georgescu

Krishnaswamy Ramkumar

Ryan Tasuo Hirose

Fredrick B Jenne

Bo Jin

Xiaojun Yu

Vijay Raghavan

Cristinel Zonte

Long Hinh

Kaveh Shakeri

Leonard Vasile Gitlan

Paul Fredrick Ruths

James Paul Myers

James Montague Cleeves

Thomas H Lee

Mark G Johnson

Andrew J Walker

Vivek Subramanian

Paul Michael Farmwald

Ali Keshavarzi

N Johan Knall

Sungkwon Lee

Vijay Srinivasaraghavan

Gyu-Chul Kim

Christopher John Petti

Sagy Charel Levy

Michael A Vyvoda

Sam G Geha

Gary Peter Moscaluk

Ravindra Manohar Kapre

William W C Koutny, Jr

Jeremy L Warren

Gary P Mosculak

Ryan Hirose

A method to integrate silicon-oxide-nitride-oxide-silicon (SONOS) transistors into a complementary metal-oxide-semiconductor (CMOS) flow including a triple gate oxide structure. The memory device may include a non-volatile memory (NVM) transistor that has a charge-trapping layer and a blocking dielectric, a first field-effect transistor (FET) including a first gate oxide of a first thickness, a second FET including a second gate oxide of a second thickness, a third FET including a third gate oxide of a third thickness, in which the first thickness is greater than the second thickness and the second thickness is greater than the third thickness.

Embedded sonos with triple gate oxide and manufacturing method of the same

There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.

Dense arrays and charge storage devices

A method of erasing, during an erase operation, a non-volatile memory (NVM) cell of a memory device is disclosed. The erasing includes applying a first HV signal (VPOS) to a common source line (CSL). The CSL is shared among NVM cells of a sector of NVM cells. The first HV signal is above a highest voltage of a power supply. The erasing also includes applying the first HV signal to a local bit line (BL).

High voltage architecture for non-volatile memory

A non-volatile memory that includes a shared source line configuration and methods of operating the same to reduce disturbs is provided. In one embodiment, the method includes coupling a first positive high voltage to a first global wordline in a first row of an array of memory cells, and coupling a second negative high voltage (V) to a first bitline in a first column of the array to apply a bias to a non-volatile memory transistor in a selected memory cell to program the selected memory cell. A margin voltage having a magnitude less than Vis coupled to a second global wordline in a second row of the array, and an inhibit voltage coupled to a second bitline in a second column of the array.

Method to reduce program disturbs in non-volatile memory cells

A device including both drain extended metal-on-semiconductor (DE_MOS) and low-voltage metal-on-semiconductor (LV_MOS) transistors and methods of manufacturing the same are provided. In one embodiment, the method includes implanting ions of a first-type at a first energy level in a drain portion of a first DE_MOS transistor in a DE_MOS region of a substrate to form the first DE_MOS transistor, and implanting ions of the first-type at a second energy level in a LV_MOS region of the substrate adjust a voltage threshold of a first LV_MOS transistor, while concurrently implanting ions of the first-type at the second energy level in the drain portion of the first DE_MOS transistor to form a drain extension of the first DE_MOS transistor. Other embodiments are also provided.

Method of forming drain extended MOS transistors for high voltage circuits

A method for operating a memory device includes the steps of providing a first voltage to a first transistor of a first memory cell and a third transistor of a second memory cell, providing a second voltage to a gate of a second transistor of the first memory cell and a gate of a fourth transistor of the second memory cell, and providing a third voltage to a gate of the first transistor of the first memory cell and a gate of the third transistor of the second memory cell. Other embodiments are also described.

Systems, methods, and apparatus for memory cells with common source lines

A method of making a semiconductor device is provided. The method includes forming a deep well (DWELL) and a well (WELL) in a first region of a substrate, the WELL adjacent a surface of the substrate so that an interface between the WELL and DWELL is exposed on the surface of the substrate. A channel for a DEMOS transistor is formed in the first region over the interface and includes a first channel formed in the WELL and a second channel formed in the DWELL. A gate layer is deposited and patterned to concurrently form in the first region a first gate for the DEMOS transistor and in a second region a second gate for an ESD device. Dopants are implanted in the first and second regions to concurrently form a drain extension of the DEMOS transistor, and an ESD diffusion region of the ESD device.

Drain extended MOS transistors with split channel

Embedded SONOS with triple gate oxide and manufacturing method of the same

A system including a memory architecture is described. In one embodiment, the memory architecture includes an array of non-volatile memory cells, a first independently controlled voltage generation circuit, a plurality of register bits to store programmable values used by the independently controlled voltage generation circuit and a control circuit coupled to the first independently controlled voltage generation circuit. The first independently controlled voltage generation circuit is coupled to supply a positive voltage to the array during program and erase operations so that a magnitude of the positive voltage is applied across a storage note of an accessed memory cell of the array. The plurality of register bits to store programmable values used by the independently controlled voltage generation circuit to control the magnitude of the positive voltage. The control circuit controls a duration of the positive voltage. Other embodiments are also described.

Memory architecture having two independently controlled voltage pumps

Methods of integrating complementary SONOS devices into a CMOS process flow are described. The method begins with depositing and patterning a first photoresist mask over a surface of a substrate to expose a N-SONOS region, and implanting a channel for a NSONOS device through a first pad oxide, followed by depositing and patterning a second photoresist mask to expose a P-SONOS region, and implanting a channel for a PSONOS device through a second pad oxide. Next, a number of Nwells are concurrently implanted for the PSONOS device and a PMOS device in a core region of the substrate. Finally, the first and second pad oxides, which were left in place to separate the P-SONOS region and the N-SONOS region from the first and second photoresist masks, are concurrently removed. In one embodiment, implanting the Nwells includes implanting a single, contiguous deep Nwell for the PSONOS and PMOS device.

Complementary SONOS integration into CMOS flow

Methods of integrating complementary SONOS devices into a CMOS process flow are described. In one embodiment, the method begins with depositing a hardmask (HM) over a substrate including a first-SONOS region and a second-SONOS region. A first tunnel mask (TUNM) is formed over the HM exposing a first portion of the HM in the second-SONOS region. The first portion of the HM is etched, a channel for a first SONOS device implanted through a first pad oxide overlying the second-SONOS region and the first TUNM removed. A second TUNM is formed exposing a second portion of the HM in the first-SONOS region. The second portion of the HM is etched, a channel for a second SONOS device implanted through a second pad oxide overlying the first-SONOS region and the second TUNM removed. The first and second pad oxides are concurrently etched, and the HM removed.

Complimentary SONOS integration into CMOS flow

Memory devices and methods for forming the same are disclosed. In one embodiment, the device includes a non-volatile memory (NVM) transistor formed in a first region of a substrate, the NVM transistor comprising a channel and a gate stack on the substrate overlying the channel. The gate stack includes a dielectric layer on the substrate, a charge-trapping layer on the dielectric layer, an oxide layer overlying the charge-trapping layer, a first gate overlying the oxide layer, and a first silicide region overlying the first gate. The device includes a metal-oxide-semiconductor transistor formed in a second region of the substrate comprising a gate oxide overlying the substrate in the second region, a second gate overlying the gate oxide, and second silicide region overlying the second gate. A strain inducing structure overlies at least the NVM transistor and a surface of the substrate in the first region of the substrate.

Embedded SONOS based memory cells

A system including a memory architecture is described. In one embodiment, the memory architecture includes an array of non-volatile memory cells, a first independently controlled voltage generation circuit, a plurality of register bits to store programmable values used by the independently controlled voltage generation circuit and a control circuit coupled to the first independently controlled voltage generation circuit. The first independently controlled voltage generation circuit is coupled to supply a positive voltage to the array during program and erase operations so that a magnitude of the positive voltage is applied across a storage node of an accessed memory cell of the array. The plurality of register bits to store programmable values used by the independently controlled voltage generation circuit to control the magnitude of the positive voltage. The control circuit controls a duration of the positive voltage. Other embodiments are also described.

A non-volatile memory and methods of operating the same to reduce disturbs is provided. In one embodiment, the method includes coupling a first positive high voltage to a first global wordline in a first row of an array of memory cells, and coupling a second negative high voltage (V) to a first bitline in a first column of the array to apply a bias to a non-volatile memory transistor in a selected memory cell to program the selected memory cell. A margin voltage having a magnitude less than VNEG is coupled to a second global wordline in a second row of the array, and an inhibit voltage coupled to a second bitline in a second column of the array to reduce a bias applied to a non-volatile memory transistor in an unselected memory cell to reduce program disturb of data programmed in the unselected memory cell due to programming.

Systems, methods, and apparatus are disclosed for implementing memory cells having common source lines. The methods may include receiving a first voltage at a first transistor. The first transistor may be coupled to a second transistor and included in a first memory cell. The methods include receiving a second voltage at a third transistor. The third transistor may be coupled to a fourth transistor and included in a second memory cell. The first and second memory cells may be coupled to a common source line. The methods include receiving a third voltage at a gate of the second transistor and a gate of the fourth transistor that may cause them to operate in cutoff mode. The methods may include receiving a fourth voltage at a gate of the first transistor. The fourth voltage may cause a change in a charge storage layer included in the first transistor.

Growing community of inventors

Santa Clara, CA, United States of America

Igor G Kouznetsov