Taiwan Semiconductor Manufacturing Comp. Ltd.

I-Wen Hsu

Yu-Yun Peng

Jei-Ming Chen

An-Di Sheu

A method is provided. Plural semiconductor fins are formed on a substrate, and plural trenches each of which is formed between two adjacent semiconductor fins. A silicon liner layer is deposited to be conformal to the semiconductor fins and the trenches. The silicon liner layer is deposited by using a silane compound. Then, an oxide layer is deposited on the silicon liner layer to fill the trenches and cover the semiconductor fins, in which depositing the oxide layer forms water in the oxide layer. Next, a surface of the silicon liner layer is reacted with the water, so as to remove the water from the oxide layer.

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Kaohsiung, Taiwan

I-Wen Hsu