Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Psk Inc. (2 from 29 patents)
2 patents:
1. 10312060 - Plasma generating apparatus using mutual inductive coupling and substrate treating apparatus comprising the same
2. 9536708 - Plasma generating device, method of controlling the same, and substrate processing device including the plasma generating device