Skhynix Inc.

Hynix Semiconductor Inc.

Hyo Seob Yoon

Min Su Kim

Woo Jin Kim

Ji Yong Park

Ok Min Moon

Han Woo Cho

Hyo Gun Yoon

Pyeong Won Oh

Hoon Jung Oh

Yong Seok Lee

Kee Joon Oh

Ji Hye Han

Baik Il Choi

Baik Ii Choi

A variable resistance memory device and a method of manufacturing the same are provided. The variable resistance memory device may include a multi-layered insulating layer formed on a semiconductor substrate, on which a lower electrode is formed. The multi-layered insulating layer may include a first hole and a second hole, concentrically formed therein, to expose the lower electrode, wherein a diameter of the first hole is larger than a diameter of the second hole. A variable resistance material layer may be formed in the second hole to contact the lower electrode, and an upper electrode may be formed in the first hole to contact the variable resistance material layer.

Variable resistance memory device with variable resistance material layer

Variable resistance memory device and method of manufacturing the same

A variable resistance memory device and a method of manufacturing the same are provided. The variable resistance memory device may include a multi-layered insulating layer formed on a semiconductor substrate, on which a lower electrode is formed. The multi-layered insulating layer may include a first hole and a second hole, concentrically formed therein, to expose the lower electrode, wherein a diameter of the first hole is larger than a diameter of the second hole. A variable resistance material layer may be formed in the second hole to contact the lower electrode and an upper electrode may be formed in the first hole to contact the variable resistance material layer.

A resistive memory device and a fabrication method thereof are provided. The resistive memory device includes a bottom structure including a heating electrode, data storage materials, each of the data storage materials formed on the bottom structure in a confined structure perpendicular to the bottom structure, and having a lower diameter smaller than an upper diameter, an upper electrode formed on each of the data storage materials, and an insulation unit formed between adjacent data storage materials.

Resistive memory device and fabrication method thereof

A semiconductor apparatus and a method of fabricating the same are provided. The method includes sequentially depositing a gate electrode material and a sacrificial insulating layer on a semiconductor substrate, patterning the gate electrode material and the sacrificial insulating layer to form one or more holes exposing a surface of the semiconductor substrate, forming a gate insulating layer on an inner sidewall of the hole, forming one or more pillar patterns each filled in the hole and recessed on a top thereof, forming a contact unit and an electrode unit on the pillar pattern, removing a patterned sacrificial insulating layer and forming a spacer nitride material on the semiconductor substrate from which the patterned sacrificial insulating layer is removed, and removing portions of the spacer nitride material and a patterned gate electrode material between the pillar patterns.

Semiconductor apparatus having vertical channel transistor and method of fabricating the same

A resistive memory device and a method for manufacturing the same are provided. The resistive memory device includes a lower electrode, a variable resistive layer formed on the lower electrode and configured so that the volume thereof is contracted or expanded according to temperature, and an upper electrode formed on the variable resistive layer. At least a portion of the lower electrode is configured to be electrically connected to the upper electrode.

Resistive memory device and method for manufacturing the same

A phase change random access memory includes a semiconductor substrate, a switching device pattern formed on the semiconductor substrate, a bottom electrode contact pattern formed on the switching device pattern, a phase change layer pattern formed on the bottom electrode contact pattern, and an insulating layer disposed at a portion of an contact surface between the bottom electrode contact pattern and the phase change layer pattern.

Phase change random access memory device and method of manufacturing the same

A method for fabricating a device isolation structure of a semiconductor device includes the steps of forming a pad oxide layer and a pad nitride layer over a semiconductor substrate including a cell region and a dummy region, etching a portion of the pad nitride layer, the pad oxide layer and the semiconductor substrate to form a trench, forming a sidewall oxide layer over the sidewalls of the trench; removing the sidewall oxide layer in the dummy region, forming a silicon nitride layer over the sidewalls of the sidewall oxide layer both in the cell region and in the dummy region, filling the trench with an insulating layer, polishing the insulating layer to expose the pad nitride layer, and removing the pad nitride layer.

Method for fabricating semiconductor device having trench isolation layer

Disclosed is a capacitor for a semiconductor device, comprising: a lower electrode formed over a predetermined lower structure on a semiconductor substrate; an aluminum oxynitride film formed over the lower electrode and having a low leakage current characteristic; a yttrium oxynitride film formed over the aluminum oxynitride film and having a higher dielectric constant than the aluminum oxynitride film; and an upper electrode formed over the yttrium oxynitride film, and a manufacturing method thereof.

Capacitor for a semiconductor device and manufacturing method thereof

A method of removing an ion implanted photoresist comprises performing first cleaning a semiconductor substrate having the ion implanted photoresist using hot deionized water to which a megasonic process is applied, first rinsing the semiconductor substrate using cold deionized water, drying the semiconductor substrate, removing the ion implanted photoresist, and second cleaning the semiconductor wafer using an SPM solution.

Growing community of inventors

Gyeonggi-do, South Korea

Hyo Seob Yoon