Winbond Electronics Corporation

Windbond Electronics Corp.

Hung-Yu Wei

Pei-Hsiu Peng

Kai Jen

Wei-Che Chang

Kazuaki Takesako

Kazutaka Manabe

Yi-Hao Chien

A semiconductor device is provided. The semiconductor device includes a substrate, a first source/drain region and a second source/drain region disposed within the substrate, and a gate structure disposed on the substrate and between the first source/drain region and the second source/drain region. The semiconductor device further includes an interlayer dielectric layer disposed over the first source/drain region, the second source/drain region, and the gate structure. The interlayer dielectric layer includes a second trench extending into the second source/drain region. The semiconductor device further includes a dielectric layer disposed in the second trench, and a second source/drain contact disposed over the second source/drain region and filling the remaining portion of the second trench.

Semiconductor device and forming method thereof

A semiconductor structure is provided. The semiconductor structure includes a substrate, an isolation feature, a word line and a doped region. The substrate has an active region. The isolation feature is disposed in the substrate to define the active region. The word line is buried in the substrate and extends across the active region and the isolation feature. The word line includes a first conductive structure and a second conductive structure disposed on the first conductive structure. The doped region is disposed in the active region and adjacent to the word line, wherein a top surface of the first conductive structure is below a bottom surface of the doped region.

Dynamic random access memory structure and a method for forming the same

Provided is a semiconductor structure including multiple pairs of target patterns, a first conductive line, and a second conductive line. Each of the pairs of target patterns includes a top pattern and a bottom pattern. The first conductive line is disposed on a first side of the pairs of target patterns. The first conductive line is electrically connected to a top pattern of a (aN+1)pair of target patterns in the pairs of target patterns, a is a fixed integer greater than or equal to 2, and N is an integer greater than or equal to 0. The second conductive line is disposed on a second side of the pairs of target patterns opposite to the first side. The second conductive line is electrically connected to a bottom pattern of the (aN+1)pair of target patterns in the pairs of target patterns.

Semiconductor structure

A multi-gate semiconductor structure and its manufacturing method are provided. The semiconductor structure includes a substrate having an active area and an isolation structure adjacent to the active area. The semiconductor structure includes a gate structure formed on the substrate and a gate dielectric layer between the gate structure and the substrate. The gate structure includes a first part above the top surface of the substrate and a second part connected to the first part. The second part of the gate structure is formed in the isolation structure, wherein the isolation structure is in direct contact with the bottom surface and sidewalls of the second part of the gate structure. A method of manufacturing the semiconductor structure includes partially etching the isolation structure to form a trench exposing the top portion of sidewalls of the substrate. The gate dielectric layer and the gate structure extend into the trench.

Multi-gate semiconductor structure and method of manufacturing the same

An anti-fuse device including a substrate, a doped region, a dielectric layer, a first contact, an anti-fuse material layer, and a second contact is provided. The doped region is located in the substrate. The dielectric layer is located on the substrate and has a first opening and a second opening. The first opening and the second opening respectively expose the doped region. The first contact is located in the first opening. The anti-fuse material layer is located between the first contact and the doped region. The second contact is located in the second opening and is electrically connected to the doped region.

Anti-fuse device and manufacturing method thereof

A semiconductor structure includes a semiconductor substrate including a first active region and a chop region. The semiconductor structure also includes a source/drain region disposed in the first active region, an isolation structure disposed in the chop region, and a gate structure extending at least across the isolation structure in the chop region. The gate structure includes a gate electrode layer and a gate lining layer lining on the gate electrode layer. The gate lining layer includes a first portion having an upper surface that is lower than a bottom surface of the source/drain region.

Semiconductor memory structure and method for manufacturing the same

A dynamic random access memory (DRAM) and its manufacturing method are provided. The DRAM includes a buried word line, a bit line, a bit line contact structure, a capacitive contact structure, and an air gap structure. The buried word line is formed in the substrate and extends along a first direction. The bit line is formed on the substrate and extends along a second direction. The bit line contact structure is formed below the bit line. The capacitive contact structure is adjacent to the bit line and surrounded by the air gap structure. The air gap structure includes a first air gap and a second air gap respectively located on a first side and a second side of the capacitive contact structure. The first air gap exposes a shallow trench isolation structure in the substrate. The second air gap exposes a top surface of the substrate.

Dynamic random access memory and method for manufacturing the same

A dynamic random access memory includes a substrate, an isolation structure, and a buried word line structure. The isolation structure is located in the substrate and defines multiple active regions. The buried word line structure is located in a word line trench in the substrate, and the word line trench passes through the active regions and the isolation structure. The buried word line structure includes a gate conductive layer, a first gate dielectric layer, and a second gate dielectric layer. The gate conductive layer is located in the word line trench. The first gate dielectric layer is located on a sidewall and a bottom surface of the word line trench. The second gate dielectric layer is located between the first gate dielectric layer and the gate conductive layer, and a top surface of the second gate dielectric layer is lower than a top surface of the gate conductive layer.

Dynamic random access memory and method of fabricating the same

A semiconductor device including a substrate and a capacitor is provided. The substrate includes a memory array region. The capacitor is located in the memory array region. The capacitor includes a first electrode, a second electrode, and an insulating layer. The first electrode is located on the substrate. The second electrode includes a first conductive layer and a metal layer. The first conductive layer is located on the first electrode. The metal layer is located on the first conductive layer. The metal layer exposes a portion of the first conductive layer. The insulating layer is located between the first electrode and the second electrode.

Semiconductor device and manufacturing method thereof

A semiconductor device and a manufacturing method of the same are provided. The method includes forming a plurality of first conductive structures and a first dielectric layer between the first conductive structures on a substrate. The method also includes forming a trench between the first dielectric layer and the first conductive structures. The method further includes forming a liner material on a sidewall and a bottom of the trench. In addition, the method includes forming a conductive plug on the liner material in the trench. The method also includes removing the liner material to form an air gap, and the air gap is located between the conductive plug and the first dielectric layer.

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Taichung, Taiwan

Hung-Yu Wei