Taiwan Semiconductor Manufacturing Comp. Ltd.

Integrated Circuit Solution Inc.

Hung-Wen Chang

Yue-Der Chih

Shao-Yu Chou

Tien-Chih Cheng

Lien-Sheng Yang

Du-Cheng Wang

Methods for removing particles from a wafer for photolithography. A method is provided including providing a semiconductor wafer; attaching a polyimide layer to a backside of the semiconductor wafer; and performing an etch on an active surface of the semiconductor wafer; wherein particles that impinge on the backside during the etch are captured by the polyimide layer. In another method, includes attaching a layer of polyimide film to a backside of a semiconductor wafer; dry etching a material on an active surface of the semiconductor wafer; depositing of an additional layer of material on the active surface of the semiconductor wafer; removing the layer of polyimide film from the backside of the semiconductor wafer; patterning the layer of material using an immersion photolithography process to expose a photoresist on the active surface of the wafer; and repeating the attaching, dry etching, depositing, removing and patterning steps.

Methods for particle reduction in semiconductor processing

A device for detecting defective memory includes a first global word line; a second global word line; a global word-line front end, connected to the first global word line; a global word-line driver, connected to the global word-line front end and driving the first global word line; a local word-line driver, connected to the first global word line and driving a local word line; and a voltage-controlled transistor, including a first terminal connected to the first global word line, a second terminal connected to a connection line between the global word-line front end and the global word-line driver, and a third terminal outputting a test current.

Device for detecting defective global word line

A charge pump voltage regulating circuit which uses a constant current generator and a second current generator, controlled by the output voltage of the charge pump circuit. The current from the constant current generator is divided between the input to a current controlled oscillator and the second current generator. When the output voltage of the charge pump circuit increases the current in the second current generator increases, the current flowing into the current controlled oscillator decreases, the frequency of the clock signals supplied to the charge pump circuit decreases, and the output voltage of the charge pump circuit decreases. When the output voltage of the charge pump circuit decreases the current in the second current generator decreases, the current flowing into the current controlled oscillator increases, the frequency of the clock signals supplied to the charge pump circuit increases, and the output voltage of the charge pump circuit increases.

Growing community of inventors

Hsin-Chu, Taiwan

Hung-Wen Chang