Average Co-Inventor Count = 8.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla Tencor Corporation (2 from 1,787 patents)
2 patents:
1. 10663279 - Dynamic determination of metal film thickness from sheet resistance and TCR value
2. 10598477 - Dynamic determination of metal film thickness from sheet resistance and TCR value