Freescale Semiconductor,inc.

Motorola Corporation

Freescale Semiconductors Inc.

Hsing H Tseng

Olubunmi O Adetutu

Tien Ying Luo

Philip J Tobin

Paul Grudowski

Dina H Triyoso

David Gilmer

Sangwoo Lim

Wei E Wu

Chun-Li Liu

Voon-Yew Thean

Rama I Hegde

Tushar Praful Merchant

James Kenyon Schaeffer, Iii

Christopher C Hobbs

Cindy Reidsema Simpson

Choh-Fei Yeap

Sriram Kalpat

Leonard John Borucki

Mohamad M Jahanbani

Joe Mogab

Darrell Roan

Ricardo Garcia

A semiconductor fabrication process for forming a gate dielectric includes depositing a high-k dielectric stack including incorporating nitrogen into the high-k dielectric stack in-situ. A top high-k dielectric is formed overlying the dielectric stack and the dielectric stack and the top dielectric are annealed. Depositing the dielectric stack includes depositing a plurality of high-k dielectric layers where each layer is formed in a distinct processing step or set of steps. Depositing one of the dielectric layers includes performing a plurality of atomic layer deposition processes to form a plurality of high-k sublayers, wherein each sublayer is a monolayer film. Depositing the plurality of sublayers includes depositing a nitrogen free sublayer and depositing a nitrogen bearing sublayer. Depositing the nitrogen free sublayer includes pulsing an ALD chamber with HfCl, purging the chamber with an inert, pulsing the chamber with an HO or DO, and purging the chamber with an inert.

In-situ nitridation of high-k dielectrics

A gate dielectric is treated with a nitridation step and an anneal. After this, an additional nitridation step and anneal is performed. The second nitridation and anneal results in an improvement in the relationship between gate leakage current density and current drive of the transistors that are ultimately formed.

Method of making a nitrided gate dielectric

A gate dielectric structure () fabrication process includes forming a transitional dielectric film () overlying a silicon oxide film (). A high dielectric constant film () is then formed overlying an upper surface of the transitional dielectric film (). The composition of the transitional dielectric film () at the silicon oxide film () interface primarily comprises silicon and oxygen. The high K dielectric () and the composition of the transitional dielectric film () near the upper surface primarily comprise a metal element and oxygen. Forming the transitional dielectric film () may include forming a plurality of transitional dielectric layers () where the composition of each successive transitional dielectric layer () has a higher concentration of the metal element and a lower concentration of silicon. Forming the transitional dielectric layer () may include performing multiple cycles of an atomic layer deposition process () where a precursor concentration for each cycle differs from the precursor concentration of the preceding cycle.

Transitional dielectric layer to improve reliability and performance of high dielectric constant transistors

A method of forming an electronic device includes etching a portion of a first gate dielectric layer to reduce a thickness of the gate dielectric layer within that portion. In one embodiment, portions not being etched may be covered by mask. In another embodiment, different portions may be etched during different times to give different thicknesses for the first gate dielectric layer. In a particular embodiment, a second gate dielectric layer may be formed over the first gate dielectric layer after etching the portion. The second gate dielectric layer can have a dielectric constant greater than the dielectric constant of the first gate dielectric layer. Subsequent gate electrode and source/drain region formation can be performed to form a transistor structure.

Method of forming an electronic device

A method for forming a dielectric is disclosed. The method comprises forming a first dielectric layer over semiconductor material. A diffusion barrier material is introduced into the first dielectric layer. Lastly, a second dielectric layer is formed over the first dielectric layer after the introducing.

Multi-layer dielectric containing diffusion barrier material

A method for forming at least a portion of a semiconductor device includes providing a semiconductor substrate, flowing a first precursor gas over the substrate to form a first metal-containing layer overlying the semiconductor substrate, and after completing said step of flowing the first precursor gas, flowing a first deuterium-containing purging gas over the first metal-containing layer to incorporate deuterium into the first metal-containing layer and to also purge the first precursor gas. The method may further include flowing a second precursor gas over the first metal-containing layer to react with the first metal-containing layer to form a metal compound-containing layer, and flowing a second deuterium-containing purging gas over the metal compound-containing layer to incorporate deuterium into the metal compound-containing layer and to also purge the second precursor gas.

Method for forming a layer using a purging gas in a semiconductor process

A semiconductor device has a P channel gate stack comprising a first metal type and a second metal type over the first metal type and an N channel gate stack comprising the second metal type in direct contact with a gate dielectric/etch stop layer stack. The N channel gate stack and the P channel gate stack are etched by a dry etch. Either the gate dielectric or etch stop can be in contact with the substrate. The etch stop layer prevents the dry etch of the first and second metal layers from etching through the gate dielectric and gouging the underlying substrate.

Process for forming dual metal gate structures

A metal oxide high-k dielectric is deposited on a semiconductor wafer in a manner that reduces dangling bonds in the dielectric without significantly thickening interfacial oxide thickness. A metal oxide precursor and radical oxygen and/or radical nitrogen are co-flowed over the semiconductor wafer to form the high-k dielectric. The radicals bond to dangling bonds of the metal of the metal oxide during the deposition process that is performed at the regular deposition temperature of less than about 400 degrees Celsius. The radical oxygen and radical nitrogen do not require the higher temperatures generally required in an anneal in order to attach to the dangling bonds of the metal. Thus, a high temperature post deposition anneal, which tends to cause interfacial oxide growth, is not required. The dielectric is of higher quality than is typical because the dangling bonds are removed during deposition rather than after the dielectric has been deposited.

Radical oxidation and/or nitridation during metal oxide layer deposition process

A transistor device has a gate dielectric with at least two layers in which one is hafnium oxide and the other is a metal oxide different from hafnium oxide. Both the hafnium oxide and the metal oxide also have a high dielectric constant. The metal oxide provides an interface with the hafnium oxide that operates as a barrier for contaminant penetration. Of particular concern is boron penetration from a polysilicon gate through hafnium oxide to a semiconductor substrate. The hafnium oxide will often have grain boundaries in its crystalline structure that provide a path for boron atoms. The metal oxide has a different structure than that of the hafnium oxide so that those paths for boron in the hafnium oxide are blocked by the metal oxide. Thus, a high dielectric constant is provided while preventing boron penetration from the gate electrode to the substrate.

Transistor with layered high-K gate dielectric and method therefor

Using plating, metal gates for N channel and P channel transistors are formed of different materials to achieve the appropriate work function for these N and P channel transistors. The plating is achieved with a seed layer consistent with the growth of the desired layer. The preferred materials are selected from the platinum metals, which comprise ruthenium, ruthenium oxide, iridium, palladium, platinum, nickel, osmium, and cobalt. These are attractive metals because they are relatively high conductivity, can be plated, and provide a good choice of work functions for forming P and N channel transistors.

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Austin, TX, United States of America

Hsing H Tseng