Taiwan Semiconductor Manufacturing Comp. Ltd.

Other

Hsien-Chang Wu

Hsiang-Huan Lee

Chao-Hsien Peng

Ching-Fu Yeh

Li-Lin Su

Shau-Lin Shue

Ming-Han Lee

Shih-Kang Fu

Shin-Yi Yang

Chung-Ju Lee

Tzu-Jin Yeh

Cheng-Hsiung Tsai

Bo-Jiun Lin

Ming Han Lee

Yu-Tai Chia

Ming-Ta Yang

Hung-Sung Hsu

In a method for manufacturing a semiconductor device, a dielectric layer is formed over a substrate. A first pattern and a second pattern are formed in the first interlayer dielectric layer. The first pattern has a width greater than a width of the second pattern. A first metal layer is formed in the first pattern and the second pattern. A second metal layer is formed in the first pattern. A planarization operation is performed on the first and second metal layers so that a first metal wiring by the first pattern and a second metal wiring by the second pattern are formed. A metal material of the first metal layer is different from a metal material of the second metal layer. The first metal wiring includes the first and second metal layers and the second metal wiring includes the first metal layer but does not include the second metal layer.

Semiconductor device and manufacturing method thereof

A method of fabricating a semiconductor integrated circuit (IC) is disclosed. The method includes providing a substrate and depositing a conductive layer on the substrate. A patterned hard mask and a catalyst layer are formed on the conductive layer. The method further includes growing a plurality of carbon nanotubes (CNTs) from the catalyst layer and etching the conductive layer by using the CNTs and the patterned hard mask as an etching mask to form metal features.

Method of semiconductor integrated circuit fabrication

Disclosed are a method of manufacturing sport protective equipment and sport protective equipment manufactured by the method. A thin casing is manufactured by a thin sheet material in a vacuum forming process; protrusions are formed apart from one another on a surface of the thin casing; a containing space is formed on an inner side of each protrusion for filling a filler; and a substrate is provided to seal the bottom of the thin casing, so that the filler in each of the containing spaces will not fall out, so as to improve the manufacturing efficiency and the product quality. The sport protective equipment manufactured by this method does not require any sewing manufacture or increase thickness, so that the flexibility of wearing and using is improved, and the thin casing and the filler are provided for absorbing shocks to improve the protective effect.

Method of manufacturing sports protective equipment, and sport protective equipment manufactured by the same

The present disclosure involves a method of fabricating a semiconductor device in a semiconductor technology node that is 5-nanometer or smaller. An opening is formed that extends through a plurality of layers over a substrate. A barrier layer is formed on surfaces of the opening. A liner layer is formed over the barrier layer in the opening. The barrier layer and the liner layer have different material compositions. The opening is filled with a non-copper metal material. The non-copper material is formed over the liner layer. In some embodiments, the non-copper metal material includes cobalt.

Trench liner for removing impurities in a non-copper trench

A dielectric layer is formed on a substrate and patterned to form an opening. The opening is filled and the dielectric layer is covered with a metal layer. The metal layer is thereafter planarized so that the metal layer is co-planar with the top of the dielectric layer. The metal layer is etched back a predetermined thickness from the top of the dielectric layer to expose the inside sidewalls thereof. A sidewall barrier layer is formed on the sidewalls of the dielectric layer. A copper-containing layer is formed over the metal layer, the dielectric layer, and the sidewall barrier layers. The copper-containing layer is etched to form interconnect features, wherein the etching stops at the sidewall barrier layers at approximately the juncture of the sidewall of the dielectric layer and the copper-containing layer and does not etch into the underlying metal layer.

Integrated circuit interconnects and methods of making same

Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a semiconductor device comprises a workpiece including a conductive feature disposed in a first insulating material and a second insulating material disposed over the first insulating material, the second insulating material having an opening over the conductive feature. A graphene-based conductive layer is disposed over an exposed top surface of the conductive feature within the opening in the second insulating material. A carbon-based adhesive layer is disposed over sidewalls of the opening in the second insulating material. A carbon nano-tube (CNT) is disposed within the patterned second insulating material over the graphene-based conductive layer and the carbon-based adhesive layer.

Semiconductor devices and methods of manufacture thereof

Semiconductor devices and methods of manufacture thereof are disclosed. In one embodiment, a method of manufacturing a semiconductor device includes providing a workpiece including a conductive feature formed in a first insulating material and a second insulating material disposed over the first insulating material. The second insulating material has an opening over the conductive feature. The method includes forming a graphene-based conductive layer over an exposed top surface of the conductive feature within the opening in the second conductive material, and forming a carbon-based adhesive layer over sidewalls of the opening in the second insulating material. A carbon nano-tube (CNT) is formed in the patterned second insulating material over the graphene-based conductive layer and the carbon-based adhesive layer.

A method of fabricating a semiconductor integrated circuit (IC) is disclosed. The method includes providing a substrate. A conductive layer is deposited on the substrate. A patterned hard mask is formed on the conductive layer and then a patterned photoresist is formed on the patterned hard mask and the conductive layer. A local metal catalyst layer is formed on the conductive layer in the openings of the patterned photoresist. Carbon nanotubes (CNTs) are grown from the local metal catalyst layer. The conductive layer is etched by using the CNTs and the patterned hard mask as etching mask to form metal features. An inter-level dielectric (ILD) layer is deposited between metal features.

Growing community of inventors

Taichung, Taiwan

Hsien-Chang Wu