Gudeng Precision Industrial Co., Ltd.

Hsiao-Chia Lo

Ming-Chien Chiu

Yung-Chin Pan

Chih-Ming Lin

Reticle pod connecting frame

The present invention relates to a latch guide assembly configured on the bottom of a wafer carrier. The latch guide assembly comprises a guide module having at least one guiding groove, a latch module having at least one side plate and at least one recess on the at least one side plate, and at least one rolling unit configured between the at least one guiding groove and the at least one recess. The latch module combines with the guide module via the at least one rolling unit and moves along with the guide module. The latch guide assembly provides a precise moving mechanism to lock/unlock the wafer carrier and reduces both the failure rate and dust production.

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Taipei, Taiwan

Hsiao-Chia Lo