National Science Council

Hsiang-Ming Tseng

Jyh-Shin Chen

Cheng-Chung Jaing

Long-Sheng Liao

Pey-Shiun Yeh

Ming-Chih Lee

Zincselenide (ZnSe) thin films were grown on quartz glass and GaAs(100) substrates by continuous wave (CW) CO laser with ion beam assisted deposition. The ZnSe thin films are applied for multilayer anti-reflection coatings and blue light emitting devices. There are advantages to this technique over the Ion-Beam coating, MBE, MOCVD and PLD methods for fabricating layered semiconductors. It is cheaper and safer than Ion-Beam coating, MBE, MOCVD and others. It is cheaper and safer to heat the target locally by using a continuous wave laser so that contaminations and heat radiation are reduced. It is also cheaper and safer to avoid the splash of PLD.

Growing community of inventors

Hsin-Chu, Taiwan

Hsiang-Ming Tseng