Leybold-heraeus Gmbh

Leybold-heraeus Gmbh & Co. Kg

Horst Schwiecker

Gernot Thorn

Alfons Zoller

Hans-Peter Ehrl

An arrangement for measuring and controlling the thickness of optically transparent coatings during their build-up on substrates in vacuum coating installations. The measurement is carried out by determining at least one reference value and at least one measured value for the transmission or reflection value of the coated object by using a measuring light beam, a monochromator, a photo-receiver, an amplifier and an analyzing circuit.

Method of and photometric arrangement for measuring and controlling the

An arrangement and photometer for measuring and controlling the thickness of optically active thin layers wherein the axis of the measurement light beam coming from the measurement light source is directed to the measurement object and a referenced light receiver, independent of the optical properties of the measurement object, is associated with the measurement light beam. The output signal of the referenced light receiver is mixed with a trigger stage for a phase sensitive photometer amplifier and is fed to a compensation circuit for the equilization of brightness variations in the measurement light source.

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Kahl am Main, Germany

Horst Schwiecker