Lsi Logic Corporation

Lsi Corporation

Hongqiang Lu

Peter Austin Burke

Wilbur G Catabay

William K Barth

Byung-Sung Kwak

Sey-Shing Sun

Wei-Jen Hsia

Valeriy K Sukharev

Masaichi Eda

Hiroaki Takikawa

Yongbae Kim

Sang-Yun Lee

A copper interconnect with a Sn coating is formed in a damascene structure by forming a trench in a dielectric layer. The trench is formed by electroplating copper simultaneously with a metal dopant to form a doped copper layer. The top level of the doped copper layer is reduced to form a planarized surface level with the surface of the first dielectric layer. The doped copper is annealed to drive the metal dopants to form a metal dopant capping coating at the planarized top surface of the doped copper layer.

Forming copper interconnects with Sn coatings

A dual damascene interconnect structure is formed by patterning a first dielectric to form a metal line. A second dielectric is disposed on the first dielectric and patterned to form a via. The first metal line is patterned in a configuration relative to a via landing so that a cavity is formed when the via etch into the second dielectric is extended into the first dielectric. The cavity is filled with a conductive metal in an integral manner with the formation of the via to form a via projection for improved electrical contact between the via and the metal line.

Dual damascene interconnect structure with improved electro migration lifetimes

A low resistance copper damascene interconnect structure is formed by providing a thin dielectric film such as SiC or SiOC formed on the sidewalls of the via and trench structures to function as a copper diffusion barrier layer. The dielectric copper diffusion barrier formed on the bottom of the trench structure is removed by anisotropic etching to expose patterned metal areas. The residual dielectric thus forms a dielectric diffusion barrier film on the sidewalls of the structure, and coupled with the metal diffusion barrier subsequently formed in the trench, creates a copper diffusion barrier to protect the bulk dielectric from copper leakage.

Method and structure for creating ultra low resistance damascene copper wiring

Nanotube memory cells are formed on a semiconductor substrate. Lower and upper memory cell chambers are formed by forming a first trench overlying the first and second contacts in a nitride layer, forming a second trench overlying the first and second contacts in a dielectric layer, depositing a nitride layer on the combined lower and upper chambers, and patterning the nitride layer to form an access hole to the nanotube layer and a second access hole to the second contact. A conductive layer is then deposited and patterned to form a top electrode contact and a nanotube layer contact. The conductive material closes the aperture created by the access hole.

Layout design and process to form nanotube cell for nanotube memory applications

A method of forming a metal interconnect in an integrated circuit. A copper layer is formed over dielectric structures on the integrated circuit, where the dielectric structures have an upper level. The copper layer is planarized to be no higher than the upper level of the dielectric structures, without reducing the upper level of the dielectric structures. An electrically conductive capping layer is formed over all of the copper layer, without the capping layer forming over any of the dielectric structures.

Interconnect integration

The present invention is directed to a silicon carbide anti-reflective coating (ARC) and a silicon oxycarbide ARC. Another embodiment is directed to a silicon oxycarbide ARC that is treated with oxygen plasma. The invention includes method embodiments for forming silicon carbide layers and silicon oxycarbide layers as ARC's on a semiconductor substrate surface. Particularly, the methods include introducing methyl silane materials into a process chamber where they are ignited as plasma and deposited onto the substrate surface as silicon carbide. Another method includes introducing methyl silane precursor materials with an inert carrier gas into the process chamber with oxygen. These materials are ignited into a plasma, and silicon oxycarbide material is deposited onto the substrate. By regulating the oxygen flow rate, the optical properties of the silicon oxycarbide layer can be adjusted. In another embodiment, the silicon oxycarbide layer can be treated with oxygen plasma.

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Lake Oswego, OR, United States of America

Hongqiang Lu