Samsung Electronics Co., Ltd.

Hongche Noh

Janghee Lee

Chungsam Jun

Suyoung Lee

Yujin Cho

Inhye Park

Jonghyuk Kang

Disclosed are semiconductor inspection apparatuses and methods. The semiconductor inspection apparatus comprises a stage that supports a semiconductor device, a first column that irradiates a first electron beam toward the semiconductor device on the stage, a second column that irradiates a second electron beam toward the semiconductor device, and a detector that detects a secondary electron generated by the second electron beam. The first column is disposed to make a first angle with a top surface of the semiconductor device. The second column is disposed to make a second angle with the top surface of the semiconductor device. The first angle and the second angle are different from each other.

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Seoul, South Korea

Hongche Noh