Macronix International Co., Ltd.

Nano-architect Research Corporation

Industrial Technology Research Institute

Tsinghua University

Other

National Science Council

Hong-Ji Lee

Fang-Hao Hsu

Andrew Teh Hu

Zusing Yang

Der-Ray Huang

Wen-Yih Liao

Shih-Ping Hong

Hsu-Sheng Yu

David Guang-Kai Jeng

Hang-Ting Lue

Shih-Hung Chen

Chun-Hung Lee

Chin-Cheng Yang

Chien-Liang Huang

Don-Yau Chiang

Nan-Tsu Lian

Kuo Liang Wei

Min-Hsuan Huang

Fred Yingyi Chen

Tsung-Nane Kuo

Shi-Jae Ye

Kuang-Chao Chen

Tzung-Ting Han

Tzuan-Ren Jeng

Jui-Hung Yeh

Ming-Chia Lee

Yu-Fong Huang

An-Chyi Wei

Yuan-Chieh Chiu

Chih-Chin Chang

Huei-Wen Yang

Lo Yueh Lin

Ying-Jen Kao

I-Ting Lin

Jen-Cheng Chang

Jin-Sen Chen

Yu-Hsiang Yeh

Li-Wei Wang

Jian-Liang Huang

Fu-Xing Zhou

Tein-Sone Chen

Ching-An Chen

Ding-Yih Hu

Hsu Sheng Yu

T H Yang

N T Lian

Kuo-Feng Lo

Xin-Guan Lin

An integrated circuit structure includes a substrate, a conductive layer, a plurality of memory devices, a bonding pad, and a source line. The conductive layer is over the substrate. The memory devices are stacked in a vertical direction over the conductive layer. The bonding pad is over the conductive layer. The source line extends upwardly from the bonding pad and has a lower portion inlaid in the bonding pad and an upper portion having a sidewall coterminous with a sidewall of the bonding pad. A top end of the source line has a first lateral dimension greater than a second lateral dimension of the bonding pad.

Memory device with source line over a bonding pad

A memory device includes a first stack structure, a second stack structure, a channel pillar, a storage layer, and a conductive pillar. The first stack structure includes a first insulating layer and a first conductive layer located on the first insulating layer. The second stack structure is located on the first stack structure and includes a plurality of second conductive layers and a plurality of second insulating layers which alternate with each other. The channel pillar penetrates through the second stack structure and extends to the first stack structure. The storage layer is located between the channel pillar and the first stack structure and between the channel pillar and the second stack structure. The conductive pillar is located in the first conductive layer and electrically connected to the first conductive layer and the substrate.

Memory device and manufacturing method thereof

A three-dimensional non-volatile memory and a method of manufacturing the same are provided. The three-dimensional non-volatile memory includes a substrate, a charge storage structure, a stacked structure and a channel layer. The charge storage structure is disposed on the substrate. The stacked structure is disposed at a side of the charge storage structure and includes insulating layers, gates, a buffer layer and a barrier layer. The insulating layers and the gates are alternately stacked. The buffer layer is disposed between each of the gates and the charge storage structure and on the surfaces of the insulating layers. The barrier layer is disposed between each of the gates and the buffer layer. An end of the gate is convex with respect to an end of the barrier layer in a direction away from the channel layer.

Three-dimensional non-volatile memory and manufacturing method thereof

An interconnect structure including a substrate and a conductive pattern is provided. The conductive pattern includes a bottom portion. The bottom portion of the conductive pattern is disposed on the substrate. The conductive pattern has a notch on each of two sidewalls of the bottom portion.

Interconnect structure and fabricating method thereof

An interconnect structure including a substrate, a dielectric layer, a first conductive pattern, and a second conductive pattern is provided. The dielectric layer is disposed on the substrate and has an opening. The first conductive pattern is disposed in the opening. The second conductive pattern is disposed on the first conductive pattern and exposes an exposed portion of the first conductive pattern. The exposed portion of the first conductive pattern has a notch.

A method of fabricating a semiconductor device is provided. A dielectric layer is formed on a barrier layer. A first opening is formed in the dielectric layer and exposes a portion of the barrier layer. A protection layer is formed on the barrier layer at the bottom of the first opening. The protection layer is thicker at the central portion while thinner at the edge portion thereof. A portion of the exposed barrier layer is removed by using the protection layer as a mask to form a second opening. The second opening has at least one sub-opening disposed in the barrier layer adjacent to the sidewall of the second opening. A semiconductor device formed with the method is also provided.

Semiconductor device and method of fabricating the same

Provided is a method of fabricating a semiconductor device, including the following. A first material layer, a second material layer and a mask layer are formed on a substrate. A portion of the second material layer is removed by performing a first etching process with the mask layer as a mask, so as to expose the first material layer and form a first pattern layer and a second pattern layer. A portion of the first material layer is removed by performing a second etching process with the mask layer as a mask, so as to expose a portion of the substrate. A portion of the substrate is removed by performing a third etching process with the mask layer as a mask, so as to form first trenches and second trenches. Sidewalls of the second trenches and a surface of the substrate form at least two different angles.

Provided is a semiconductor device and a method of manufacturing the same. The semiconductor device includes a substrate and a dielectric layer. The dielectric layer is located on the substrate. The dielectric layer has a plurality of openings, and side walls of the openings have concave-and-convex profile.

Semiconductor device and method of manufacturing the same

A method of eliminating overhang in a contact hole formed in a contact film stack is described. A liner layer is overlaid on the contact film stack, the liner also coating the contact hole. A portion of the liner is removed to expose the overhang, and the exposed overhang is removed. The liner is also used to fill-in a bowing profile of the contact hole, thereby rendering sidewalls of the contact hole smooth and straight suitable for metal fill-in while suppressing piping defects.

Method of controlling contact hole profile for metal fill-in

Effects of copper oxide formation in semiconductor manufacture are mitigated by etching with sulfide plasmas. The plasmas form protective copper sulfide films on copper surfaces and prevent copper oxide formation. When copper oxide formation does occur, the sulfide plasmas are able to transform the copper oxide into acceptable or more conductive copper compounds. Non-oxide copper compounds are removed using clear wet strips.

Method of forming copper sulfide film for reducing copper oxidization and loss

A cluster tool is disclosed that can increase throughput of a wafer fabrication process by facilitating removal of barrier overhang in contact holes of contact film stacks. Individual chambers of the cluster tool provide for deposition of barrier material onto a semiconductor structure, depositing over with an amorphous carbon film (ACF), etching back the ACF, and etching a corner region of the contact hole. Removal of the barrier overhang improves the quality of metal fill-in of the contact hole. An expectedly ensuing feature entails a technique in which filling-in of the contact hole with a metal such as tungsten can be achieved with attenuated or eliminated adverse consequence.

Cluster system for eliminating barrier overhang

A method is described that facilitates inter-layer dielectric fill-in among transistors in a densely-configured array of an integrated circuit. An etch process that exploits a micro-loading effect to create a T-shaped profile between transistors is disclosed. The micro-loading has a negligible effect on transistors in a peripheral region of the integrated circuit.

Method of shaping densely arranged PL gates and peripheral MOS gates for ILD oxide fill-in

A self-align method of preparing semiconductor gates for formation of a silicide, such as a cobalt silicide (CoSi) layer, is disclosed. Deposition of silicon nitride (SiN) and low-temperature oxide (LTO) liner types, the SiN liner having an overhang structure, prevent damage to the gates while forming a self-aligned source. The undamaged gates are suitable for CoSi deposition.

Self-aligned liner method of avoiding PL gate damage

A three-dimensional stacked IC device includes a stack of at least first, second, third and fourth contact levels at an interconnect region. Each contact level has a conductive layer and an insulation layer. First, second, third and fourth electrical conductors pass through portions of the stack of contact levels. The first, second, third and fourth electrical conductors are in electrical contact with the first, second, third and fourth conductive layers, respectively. A dielectric sidewall spacer circumferentially surrounds the second, third and fourth electrical conductors so that the second, third and fourth electrical conductors only electrically contact the respective second, third and fourth conductive layers.

Multilayer connection structure

A small contact hole having a large aspect ratio is formed by employing a stop layer with a trench formed therein. A relatively large contact hole is formed above the trench, and the small contact hole is formed below the trench, using properties of the trench and the stop layer to limit the size of the small contact hole.

Formation of a high aspect ratio contact hole

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Hsinchu, Taiwan

Hong-Ji Lee