Fujitsu Corporation

Kabushiki Kaisha Toshiba

Matsushita Electric Industrial Co., Ltd.

International Business Machines Corporation

Mitsubishi Gas Chemical Company, Inc.

Verbatim Corporation

Hiroyuki Ikeda

Fumio Yamagishi

Takefumi Inagaki

Kozo Yamazaki

Masayuki Kato

Toshiyuki Ichikawa

Hirokazu Aritake

Masanori Ohkawa

Mitsuharu Ishii

Hiromu Inoue

Hiroshi Watanuki

Shin-ya Hasegawa

Shinichi Sato

Satoshi Maeda

Akira Ono

Toshimitsu Kumagai

Yoshitaka Murakawa

Seigo Igaki

Ichiro Sebata

Shunji Kitagawa

Katsuki Ohashi

Yuuichiro Takashima

Shinya Hasegawa

Takashi Shinzaki

Shin Eguchi

Yuzo Seo

Moritoshi Ando

Youji Arita

Takahiro Murakami

Teruo Uchida

Osamu Shimada

Seikichi Matsumoto

Yoji Arita

Eiji Sawa

Hironori Yahagi

Shigetake Iwata

Kaneyuki Kurokawa

Masayuji Kato

Osamu Shimomura

Shin-Ya Hasegawa

Syunji Kitagawa

According to one embodiment, a pattern characteristic detection apparatus for a photomask includes a detection-data creating portion, a reference-data creating portion, an extracting portion, a first area-setting portion, a detecting portion and an collecting portion. The detection-data creating portion is configured to create detection data on the basis of an optical image of a pattern formed on a photomask. The reference-data creating portion is configured to create reference data of the pattern. The extracting portion is configured to extract a pattern for pattern characteristic detection and positional information of the extracted pattern. The first area-setting portion is configured to set an area where pattern characteristics are to be detected, and configured to extract a target pattern. The detecting portion is configured to detect pattern characteristics of the target pattern within the area. In addition, the collecting portion is configured to collect the detected pattern characteristics.

Pattern characteristic-detection apparatus for photomask and pattern characteristic-detection method for photomask

A method for inspecting a photomask, comprising generating a laser beam, changing a phase of the laser beam to smooth the brightness distribution of the laser beam, applying the smoothed laser beam to the photomask, acquiring an image of the photomask using a sensor while the laser beam and the photomask are relatively moved, examining the image of the photomask for a defect of the mask-pattern of the photomask.

Method for repairing a photomask, method for inspecting a photomask, method for manufacturing a photomask, and method for manufacturing a semiconductor device

A method for inspecting an object using a time delay integration sensor. A storage time of the time delay integration sensor is changed in response to a signal level of a signal outputted from the time delay integration sensor, and a scanning speed of a scan by the time delay integration sensor is changed in response to the signal level of the signal outputted from the time delay integration sensor. The object is then scanned using the time delay integration sensor to inspect the object under the changed storage time and the changed scanning speed.

Method and device for inspecting an object using a time delay integration sensor

A method for forming a magnetic pattern in a magnetic recording medium, which includes irradiating energy beams to a magnetic recording medium having a magnetic layer on a substrate via a photomask having a transmitting portion and a nontransmitting portion to heat locally an irradiated portion of the magnetic layer. The method also includes applying an external magnetic field to the magnetic layer. The transmitting portion and the non-transmitting portion of the photomask each has a reflectivity of energy beam of 30% or less in at least one surface facing the magnetic recording medium. By using techniques of heating a local portion and applying an external magnetic field in combination, a fine magnetic pattern can be effectively and accurately formed while the production of an interference fringe is suppressed.

Method for forming a magnetic pattern in a magnetic recording medium, magnetic recording medium magnetic recording device and photomask

A magnetic recording medium for recording information by forming a magnetic pattern for information thereon by a magnetic head, which is a longitudinal magnetic recording medium having a coercive force of at least 3000 Oe, and which has a magnetic pattern for control of the magnetic head preliminarily formed thereon, wherein the full width at half maximum of an isolated pulse of a reproducing signal of the magnetic pattern for control is smaller than the full width at half maximum of an isolated pulse of a reproducing signal of the magnetic pattern for information.

Magnetic recording medium, its production method and magnetic recording apparatus

Method for forming a magnetic pattern in a magnetic recording medium, a magnetic pattern forming device, a magnetic recording medium and a magnetic recording device

An optical reading apparatus includes an optical scanning unit for emitting upward a scanning light beam to be used to optically read information on an article; and a supporting mechanism for supporting the optical scanning unit so that the optical scanning unit is maintained in a space over a surface of a counter in a state where a distance between the optical scanning unit and the surface of the counter is a predetermined length. An optical reading apparatus includes an optical scanning unit for emitting upward a main-scanning light beam to be used to optically read information on an article, and for emitting a sub-scanning light beam in a direction different from a direction in which the main-scanning light beam travels, the sub-scanning light beam being used to optically read information on an article, and a supporting mechanism for supporting the optical scanning unit so that the optical scanning unit is maintained in a space over a surface of a counter in a state where a distance between the optical scanning unit and the surface of the counter is a predetermined length.

Optical reading apparatus having optical scanner for scanning information on objects

Disclosed is a belt driven tape cartridge capable of recording data at a higher density and a higher speed than in the conventional belt driven tape cartridges. The belt driven tape cartridge includes a flexible non-magnetic support, a magnetic recording layer formed on one surface of the flexible support and having a surface roughness of 10 nm or under, and a back coat layer formed on the other surface of the flexible support and having a surface roughness being above 100 nm but under 300 nm.

Belt driven tape cartridge

An information recording medium and method arranges a plurality of information recording tracks in parallel to a running direction of an information recording medium and divides the tracks into a plurality of data blocks, and a servo-burst section between the data blocks. The servo-burst section has, alternately servo-burst-signal recording sections and servo-burst-signal non-recording section. The position of a recording/reproducing head is controlled by using a plurality of recording/reproducing head gaps provided in the head and detecting positional deviations of the head gaps from the centers of the information recording tracks. The deviations are detected from intensity changes of signals from the servo-burst-signal recording sections. The head position control is performed such that at least one of the two head gaps is located at a position to reproduce a signal from both of the servo-burst-signal recording section and the servo-burst-signal non-recording section simultaneously The placement of the servo-burst-signal recording/non-recording sections with respect to head gaps results in a ratio of the signals of the head gap located corresponding to the servo-burst-signal recording section with respect to the signal of the head gap located corresponding to the servo-burst-signal non-recording section as being a predetermined ratio.

Information recording medium and recording/reproducing method for

Optical reading apparatus having optical scanner for scanning

An achromatic hologram optical system for converting a wave front A into a wave front B. Two holograms (H.sub.1 and H.sub.2) are provided. The length of an optical path from an equiphase front of the wave front A to an equiphase front of the wave front B is constant, and each of the two holograms has a curved surface shape.

Achromatic hologram optical system

Laser scanner for bar code reader having a transparent light guide plate

Growing community of inventors

Yokohama, Japan

Hiroyuki Ikeda