Sumitomo Chemical Company, Limited

Hiroyuki Endo

Kenji Shibata

Kazutoshi Watanabe

Fumimasa Horikiri

Kazufumi Suenaga

There is provided a ferroelectric thin-film laminated substrate, including a substrate, and further including a lower electrode layer, a ferroelectric thin-film layer, an upper electrode intermediate layer, and an upper electrode layer being sequentially stacked on the substrate, in which: the lower electrode layer is made of platinum or a platinum alloy; the ferroelectric thin-film layer is made of a sodium potassium niobate (typical chemical formula of (KNa)NbO, 0.4&#x2264;x&#x2264;0.7); the upper electrode layer is made of aluminum or an aluminum alloy; the upper electrode intermediate layer is made of a metal that has less oxidizability than titanium and can generate an intermetallic compound with Aluminum; and a part of the upper electrode intermediate layer and a part of the upper electrode layer are alloyed.

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Hitachi, Japan

Hiroyuki Endo