Fanuc Corporation

Dainippon Screen Mfg. Co., Ltd.

Hirotsugu Kaihori

Tomoyuki Terada

Toru Mizuno

Kenichi Toyoda

Takayuki Ito

Tatsuya Oumi

Kyozi Iwasaki

Shinsuke Sakamoto

A measuring optical system for emitting and receiving light is fixedly installed in a ceiling portion of a measuring device, and a wafer holding part for supporting a semiconductor wafer is provided in a bottom portion of the measuring device. A support table is horizontally laid between support pins of the wafer holding part, and a calibration standard member for calibration is placed on an upper surface of the support table. When a semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the semiconductor wafer, and the reflection intensity of the light is measured. When no semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the calibration standard member, whereby the calibration can be done at any time.

Reflected light intensity ratio measuring device, device for measuring light energy absorption ratio and heat treatment apparatus

Teaching pendant for a robot

When an operator selects one of many jog modes, including a tool feed mode, robot coordinate system feed mode, user coordinate system feed mode, joint feed mode, etc., a display controller displays a jog feed direction adapted for the selected mode for superposition on a robot image on a monitor screen. If the operator depresses any of jog feed direction selector keys, the jog feed direction corresponding to the depressed key is displayed for discrimination.

Jog feed information display apparatus for a robot

Method of automatically adjusting welding conditions for an arc welding

Manual feeding method for robots

Control method for arc welding robot

Growing community of inventors

Kyoto, Japan

Hirotsugu Kaihori