Canon Machinery Inc.

Eagle Industry Co., Ltd.

Nec Machinery Corporation

Hiroshi Sawada

Yoshihiro Teshima

Kosuke Kawahara

Kou Kurosawa

To provide a method for enhancing adhesion of a thin film, and a method for enhancing adhesion of a thin film provided with a surface function caused by the shape. Adhesion of a thin film can be enhanced by irradiating the surface of a parent material with a laser beam at a fluence in the vicinity of the machining threshold, scanning the irradiated part while overlapping to form a grating structure, and then forming a solid thin film in the grating structure. When the grating structure formed on the parent material is left on the solid thin film, adhesion of the thin film is enhanced and surface functions, e.g. reduction of friction and wear caused by the shape, suppression of adhesion of fine particles, and cell sensibility, can be exhibited in conjunction with the function of the solid thin film.

Method for enhancing adhesion of thin film

The present invention provides a mechanical seal sliding member with high lubricating characteristics, in which the coefficient of friction and the temperature of sliding surfaces are lowered and stabilized without excessive leakage. In the mechanical seal sliding member of the present invention, on the sliding surface, a plurality of grating sectionsare formed separately in each of which a plurality of linear shape ridge portions parallel to each other are formed in a predetermined region with a predetermined pitch. The linear shape ridge portions of the plurality of grating sections are formed as inclined at a predetermined angle to a sliding direction of the sliding surfaces. Such periodic structure can improve the lubricating characteristics for lubrication. By irradiating a linearly polarized femtosecond laser with irradiating energy adjacent to a process threshold level to a material surface, a fine periodic structure with a cycle interval comparable with a laser wavelength and with a ridge depth half or less than the laser wavelength can be formed by a self-structuring manner.

Mechanical seal sliding member, and mechanical seal

A periodic structure is to be successively formed over an extensive area with a uniaxial laser beam. Such method includes irradiating a uniaxial laser beam near an ablation threshold to a surface of a material; and executing an overlapped scanning on the irradiated region, so as to cause an ablation by interference between an incident beam and a surface scattered wave along the material surface; increasing the scattered wave; causing an interference at an interval equal to a wavelength of the laser beam, to thereby cause spontaneous formation of a periodic structure. The periodic structure can be made to have a different ripple spacing by changing an incident angle of the laser beam to the material surface. When the laser incident beam has an angle, the ripple spacing can be changed by changing a scanning direction.

Growing community of inventors

Kusatsu, Japan

Hiroshi Sawada