Adv Antest Corporation

Hiroki Yamoto

Anthony Le

Robert F Sauer

Niels Markert

Rochit Rajsuman

The present invention is directed to a locking apparatus and loadboard assembly of a semiconductor testing device apparatus. The loadboard assembly includes a printed circuit board containing a device under test and an interface board secured to the bottom of the printed circuit board. The interface board has two members with a space between them. Spacers connect the members to form apertures for contact pins on a test head. The loadboard assembly is placed on top of a locking apparatus which is mounted on the top surface of the test head. The placement of the loadboard on the locking apparatus is done according to two pins of different cross-sections that extend through two holes in the interface board and printed circuit board of the loadboard assembly. When the loadboard assembly is placed on the locking mechanism, rollers mounted on the interface board are received in cam slots of a cam member of the locking apparatus. These rollers follow the cam slots as the cam member is moved. Based on the profile of the cam slots, the loadboard assembly can be gradually lowered to achieve contact between the printed circuit board and the contact pins on the test head and to lock the interface board.

Locking apparatus and loadboard assembly

The present invention is directed to a test head Hifix of a semiconductor device testing apparatus that does not require disassembly for maintenance or repair of the semiconductor device testing apparatus. In one embodiment, the test head Hifix of a semiconductor device testing apparatus includes a plate that resides as the top surface of a test head and on which the assembly, loadboard, socket and DUT are mounted. The plate is attached to the test head in an arrangement that allows the plate along with the assembly, loadboard, socket and DUT to be easily moved without completely disassembling the plate, assembly and loadboard from the test head. In one embodiment, the plate is attached or coupled to the test head by hinges.

Growing community of inventors

Santa Clara, CA, United States of America

Hiroki Yamoto