Canon Anelva Corporation

Hirofumi Asanuma

Junji Nakamura

Yasuyuki Shirai

Yohsuke Shibuya

There is provided a substrate support device capable of preventing powder dust from being produced. A thermoconductive intermediate member is interposed between a base table and a substrate support table and has a communication aperture path for communicating the aperture path of the base table with the aperture path of the substrate support table. An elastic member such as bellows tube is disposed in the communication aperture path of the thermoconductive intermediate member, for insulating the thermoconductive intermediate member from the inert gas which flows through the communication aperture path.

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Tokyo, Japan

Hirofumi Asanuma