Toyo Soda Manufacturing Co., Ltd.

Hideo Shuyama

Toru Seita

Yoshitaka Tsutsumi

Kousaburou Matsumura

Kyoko Nakazawa

Kosuke Takeshige

Michiharu Oogai

Halogen-containing polyacrylate derivatives having the formula: ##STR1## wherein A is a structural unit derived from a copolymeriazable monomer having a double bond; R is ##STR2## wherein each of R.sub.1 and R.sub.2 is a hydrogen atom or a fluorinated methyl group, provided R.sub.1 and R.sub.2 are not hydrogen atoms at the same time, and R.sub.3 is a hydrogen atom or a lower alkyl group; X is a halogen atom or a methyl group; and m is a positive integer, n is 0 or a positive integer, and n/m from 0 to 2, preferably from 0 to 1 are disclosed. Also disclosed are methods for forming a resist pattern by using the halogen-containing polyacrylate derivatives as a resist material.

A method of image-wise exposing and developing halogen-containing

A halogen-containing polyacrylate derivative having the formula: ##STR1## wherein A is a structural unit derived from a copolymerizable monomer having a double bond; R is ##STR2## wherein each of R.sub.1 and R.sub.2 is a hydrogen atom or a fluorinated methyl group, provided R.sub.1 and R.sub.2 are not hydrogen atoms at the same time, and R.sub.3 is a hydrogen atom or a lower alkyl group; X is a halogen atom or a methyl group; and m is a positive integer, n is 0 or a positive integer, and n/m is from 0 to 2, preferably from 0 to 1.

Halogen-containing polyacrylate derivatives

A method of producing a cation-exchange membrane having roughed surface which is characterized in mixing silica powder with water to give a suspended or pasty mixture, supporting the resultant mixture on art paper or filter paper, drying the mixture to form silica powder layer, adhering with heating and pressing the silica powder layer on surface of membrane composed of perfluorocarbon polymer, and removing the silica powder layer formed on the surface of said membrane with caustic alkali aqueous solution.

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Hofu, Japan

Hideo Shuyama