Hitachi, Ltd.

Hitachi-high-technologies Corporation

Hitachi High-tech Corporation

Hideo Kashima

Muneyuki Fukuda

Hiroyasu Shichi

Kaoru Umemura

Satoshi Tomimatsu

Hidemi Koike

Mitsuo Tokuda

Yasuaki Takada

Yasuhiro Mitsui

Hisashi Nagano

Masakazu Sugaya

Koichi Terada

Yuichiro Hashimoto

Tohru Ishitani

Eiichi Seya

Izumi Waki

Yasutaka Suzuki

Yasunori Doi

Masuyuki Sugiyama

Shigeo Moriyama

Yoshio Kawamura

Tomonori Nakano

Kenichi Kawabata

Hideyuki Kazumi

Kazuhiro Yamanaka

Naomasa Suzuki

Masao Suga

Yoshio Takahashi

Ai Masuda

Zhaohui Cheng

Takahide Terada

Yushi Tsubota

Takeyoshi Ohashi

Ruriko Tsuneta

Hideto Dohi

Wenjing Wu

Hideki Kikuchi

Tomokazu Shimakura

Kotoko Urano

Yu Yamazawa

Mitsuhiro Noda

Katsumi Nagumo

Yoshinobu Ootaka

Masashi Inada

Hiromi Satou

Hiroaki Baba

Yasutaka Iida

A charged particle beam apparatus including a winding aberration corrector capable of correcting a chromatic aberration is provided. A multi-pole lens includes a magnetic core, a plurality of current linesto, a plurality of wire-shaped electrodesto, insulating electrode fixing portionstofor fixing the plurality of electrodes to a structure in a vacuum container, and conductive shieldsset to a reference potential, which are provided between the electrode fixing portion and a central axis of the magnetic core, main line portions of the plurality of current lines are arranged axisymmetrically with respect to the central axis of the magnetic core along an inner wall of the magnetic core, and portions of the plurality of electrodes parallel to the central axis of the magnetic core are arranged axisymmetrically with respect to the central axis of the magnetic core.

Charged particle beam apparatus

Provided are a multistage-connected multipole and a charged particle beam device that can be produced with precision in machining without requiring precision in brazing between a pole and an insulation material. This multi-stage connected multipolecomprises: a plurality of poles Q-Qthat are arranged along the optical-axis direction of a charged particle beam, and that have cutouts Non surfaces facing each other; and braces P-Pthat are arranged between the plurality of poles Q-Qand are made of an insulator. The poles Q-Qand the braces P-Pare joined by fitting the braces P-Pinto the cutouts N and applying brazing so as to be interposed by a bonding material.

Multistage-connected multipole, multistage multipole unit, and charged particle beam device

The ultrasonic CT device includes: a first water tank configured such that an object is inserted therein, the first water tank being filled with a medium through which an ultrasonic wave passes; a ring array that irradiates an ultrasonic wave to the object and detects an ultrasonic wave reflected by the object while moving on an outer surface of the first water tank; and a signal processing unit that generates a tomographic image of the object based on a signal obtained by the ring array. The ultrasonic CT device further includes: a second water tank that houses the first water tank and the ring array; and a lid having a hole or a notch which is provided on a side of the object in the second water tank and which drains the medium.

Ultrasonic CT device

In order to save a space for an apparatus for inspecting a substance and reduce a cost thereof, a particle testing apparatus includes a plurality of collection ports for collecting substances to be inspected, centrifuges for concentrating particles collected in the collection ports, the centrifuges being connected to the respective collection ports in pairs, and a common analysis apparatus for acquiring the concentrated particles from the centrifuges and analyzing the particles, the analysis apparatus being connected to the centrifuges.

Substance-testing apparatus, substance-testing system, and substance-testing method

In a conventional fine particle detection device that vaporizes fine particles attached to the object of examination by heating, processing capability decreases as the processing time elapses due to the influence of deposition of fine particles other than the object of examination, dirt/dust, a residue of the fine particles as the object of examination, or residual matter. A fine particle detection device according to the present invention includes: a vaporization device that vaporizes the fine particles trapped by a trap device by vaporization or decomposition; a first flow passageway in which a mixture of a component vaporized by the vaporization device and another component flows; a second flow passageway branching from the first flow passageway in a direction of inertial force acting on the other component; a third flow passageway branching from the first flow passageway in a direction different from the direction of the inertial force; and an analysis device that analyzes a component introduced into the third flow passageway.

Microparticle detection device and security gate

An object of the present invention is to provide a sample holder that can carry out a series of observations in which a rotational series image at arbitrary angles, namely, from &#x2212;180&#xb0; to +180&#xb0; around the x-axis of an observation region and a rotational series image at arbitrary angles, namely, from &#x2212;180&#xb0; to +180&#xb0; around the y-axis are obtained without taking a sample out of a sample chamber. A sample holder includes a power unit, a power separator, a rotational movement transmission mechanism, and a linear movement transmission mechanism. The power separator separates one movement of the power unit to be distributed to the rotational movement transmission mechanism and the linear movement transmission mechanism. The rotational movement transmission mechanism provides a rotational movement around a second rotational axis. The linear movement transmission mechanism provides a linear movement around the second rotational axis.

Sample holder, charged particle beam apparatus, and observation method

Provided is a technique to identify a sample substance attached to an inspection target easily and precisely, while improving the rate of operation and reducing the number of persons required for inspection. A trace detecting system includes detection means to detect the size (vertical and horizontal dimensions) of an inspection target, and selects an air nozzle capable of spraying air jet at 15 m/s or more to the surface of the inspection target for air jet spraying.

Attached matter testing device and testing method

An explosive detection apparatus capable of maintaining high availability even in an environment containing a large amount of foreign substances is achieved. The explosive detection apparatus includes means for sequentially replacing a plurality of collection thermal vaporization filtersfor collecting, heating, vaporizing particles, which have been prepared in advance. The explosive detection apparatus also includes a preheating unitfor preheating an unused filter, and sealing is performed by a seal portion between the plurality of filters.

Particle analyzing device

Provided is an analyzer for a substance, including: a first particle holding unit having a tubular shape; a first intake pipe for sucking a gas from an upper side of the first particle holding unit to cause a cyclonic phenomenon inside the first particle holding unit; a first supply pipe for supplying a sample containing particles, the first supply pipe being connected to a side surface of the first particle holding unit; a first flow control unit for controlling a flow rate of a gas flowing into the first particle holding unit to hold the rotationally moving particles inside the first particle holding unit for a predetermined time period and then cause the particles to settle, the first flow control unit being connected to a lower part of the first particle holding unit; a first collection heating unit for collecting and heating the settled particles; and an analysis unit for analyzing a substance vaporized from the particles through the heating by the first collection heating unit, the analysis unit being connected to the first collection heating unit through a pipe.

Analyzer for substance

Provided are an aberration corrector that reduces irregularity of a magnetic field of a multipole to obtain an image of high resolution and a charged particle beam apparatus using the same. The aberration corrector includes a plurality of magnetic field type poles, a ring that magnetically connects the plurality of poles with one another and an adjustment member disposed between the pole and the ring to adjust a spacing between the pole and the ring per pole.

Aberration corrector and charged particle beam apparatus using the same

Sample fine particles attached to an inspection object are identified simply and with high accuracy, and an increase in operation rate and a decrease in device size are achieved. The inspection object is transported into a sampling chamber defined by a pair of side walls and an upper wall enclosing a part of a transport route of a transport unit. The inspection object is sprayed with compressed gas from an air nozzle, the peeled sample fine particles are aspirated into a collector, and the sample fine particles are separated from the aspirated gas for analysis. The air nozzle is disposed on one of the side walls defining the sampling chamber. The collector is disposed under the other side wall as a container independent from the sampling chamber.

Attached matter inspection device

Provided is a technique of analyzing particles in real time while collecting and condensing the particles continuously. Gas and/or particles as a detection target substance that are attached to an authentication targetare removed by air flow from a blowing region. The removed sample is sucked and is condensed and sampled at a sampling region, and ions of the sample are generated at an ion sourceand are then subjected to mass analysis at a mass analysis region. Determination of the obtained mass spectrum is made as to the presence or not of a mass spectrum derived from the detection target substance, and a monitordisplays a result thereof. Thereby, the detection target substance attached to the authentication targetcan be detected continuously in real time, promptly and with a less error rate.

Analysis device and analysis method

An apparatus that can capture a rotation series of images of an observation area within a range of &#x2212;180&#xb0; to +180&#xb0; around the x axis thereof, and can capture a rotation series of images of the observation area within a range of &#x2212;180&#xb0; to +180&#xb0; around the y axis thereof. The apparatus includes a sample mounting base having at its tip portion a mounting portion for mounting a sample thereon; a rotating jig having a mounting base holding portion that holds the sample mounting base; a sample holding rod that includes a holding portion that holds the rotating jig; a first rotation control unit that applies, to the sample holding rod, a first rotation within a range of &#x2212;180&#xb0; to +180&#xb0; with the extending direction of the sample holding rod as the axis thereof; and a second rotation control unit that applies, to the rotating jig, a second rotation within a range of &#xb1;45&#xb0; or more with the direction orthogonal to the rotation axis of the first rotation as the axis thereof, the sample mounting base being in a conical or polygonally conical form.

Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy

A sample fabricating method of irradiating a sample with a focused ion beam at an incident angle less than 90 degrees with respect to the surface of the sample, eliminating the peripheral area of a micro sample as a target, turning a specimen stage around a line segment perpendicular to the sample surface as a turn axis, irradiating the sample with the focused ion beam while the incident angle on the sample surface is fixed, and separating the micro sample or preparing the micro sample to be separated. A sample fabricating apparatus for forming a sample section in a sample held on a specimen stage by scanning and deflecting an ion beam, wherein an angle between an optical axis of the ion beam and the surface of the specimen stage is fixed and formation of a sample section is controlled by turning the specimen stage.

Method and apparatus for specimen fabrication

Growing community of inventors

Tokyo, Japan

Hideo Kashima