Pakal Technologies, LLC

Other

Fujifilm Corporation

Hidenori Akiyama

Richard A Blanchard

Woytek Tworzydlo

Vladimir Rodov

Geeng-Chuan Chern

Paul C Chang

Wayne Y W Hsueh

Woytek Tworzydio

Haru Ohkawa

Yasuo Ohtsuki

An insulated gate turn-off (IGTO) device, formed as a die, has a layered structure including a p+ layer (e.g., a substrate), an n&#x2212; epi layer, a p-well, trenched insulated gate regions formed in the p-well, and n+ regions between the gate regions, so that vertical NPN and PNP transistors are formed. The device may be formed of a matrix of cells or may be interdigitated. To turn the device on, a positive voltage is applied to the gate, referenced to the cathode. The cells further contain a vertical p-channel MOSFET, for rapidly turning the device off. The p-channel MOSFET may be made a depletion mode device by implanting boron ions at an angle into the trenches to create a p-channel. This allows the IGTO device to be turned off with a zero gate voltage while in a latch-up condition, when the device is acting like a thyristor.

Cell layouts for MOS-gated devices for improved forward voltage

A high power vertical insulated-gate switch is described that includes a parallel cell array having inner cells and an edge cell. The cells have a vertical npnp structure with a trenched field effect device that turns the device on and off. The edge cell is prone to breaking down at high currents. Techniques used to cause the current in the edge cell to be lower than the current in the inner cells, to improve robustness, include: forming a top n-type source region to not extend completely across opposing trenches in areas of the edge cell; forming the edge cell to have a threshold voltage of its field effect device that is greater than the threshold voltage of the field effect devices in the inner cells; and providing a resistive layer between the edge cell and a top cathode electrode electrically contacting the inner cells and the edge cell.

Cellular insulated gate power device with edge design to prevent failure near edge

Enhancements to cell layout and fabrication techniques for MOS-gated devices

An insulated gate turn-off thyristor has a layered structure including a p+ layer (e.g., a substrate), an n-epi layer, a p-well, vertical insulated gate regions formed in the p-well, and an n&#x2212; layer over the p-well and between the gate regions, so that vertical npn and pnp transistors are formed. After forming the p-well, boron ions are implanted into the exposed surface of the p-well to form a p+ region. The n-epi layer is then grown over the p-well and the p+ region, and the boron in the p+ region is diffused upward into the n-epi layer and downward to form an intermediate p+ region. The p-well's highly doped intermediate region enables improvement in the npn transistor efficiency as well as enabling more independent control over the characteristics of the n-type layer (emitter) and the overall dopant concentration and thickness of the p-type base to optimize the thyristor's performance.

Vertical insulated gate turn-off thyristor with intermediate p+ layer in p-base formed using epitaxial layer

An insulated gate turn-off (IGTO) device, formed as a die, has a layered structure including a P+ layer (e.g., a substrate), an N&#x2212; epi layer, a P-well, vertical insulated gates formed in the P-well, and N+ regions between at least some of the gates, so that vertical NPN and PNP transistors are formed. A source/emitter electrode is on top, and a drain/cathode electrode is on the bottom of the substrate. The device is formed of a matrix of cells. To turn the device on, a positive voltage is applied to the gates, referenced to the source/emitter electrode. Some of the cells are passive, having gates that are either not connected to the active gates or having gates that are shorted to their associated N+ regions, to customize the input capacitance and lower the saturation current. Other techniques are described to form the passive cells.

Insulated gate turn-off device having low capacitance and low saturation current

An insulated gate turn-off (IGTO) device, formed as a die, has a layered structure including a p+ layer (e.g., a substrate), an n&#x2212; epi layer, a p-well, vertical insulated gate electrodes formed in the p-well, and n+ regions between the gate electrodes, so that vertical npn and pnp transistors are formed. The device is formed of a matrix of cells. To turn the device on, a positive voltage is applied to the gate electrodes, referenced to the cathode. To speed up the removal of residual electrons in the p-well after the gate electrode voltage is removed, a p+ region is added adjacent the n+ regions, and an n-layer is added below the p+ region. The cathode electrode directly contacts the p+ region and the n+ regions. During turn-off, the p+ region provides holes which recombine with the residual electrons to rapidly terminate the current flow.

Insulated gate turn-off device with hole injector for faster turn off

A high power vertical insulated-gate switch is described that includes an active region, containing a cell array, and a surrounding termination region. The termination region is for at least the purpose of controlling a breakdown voltage and does not contain any switching cells. Assuming the anode is the silicon substrate (p-type), it is desirable to have good hole injection efficiency from the substrate in the active region in the device's on-state. Therefore, the substrate should be highly doped (p++) in the active region. It is desirable to have poor hole injection efficiency in the termination region so that there is a minimum concentration of holes in the termination region when the switch is turned off. Various doping techniques are disclosed that cause the substrate to efficiency inject holes into the active region but inefficiently inject holes into the termination region during the on-state.

Insulated gate power devices with reduced carrier injection in termination area

An insulated gate turn-off (IGTO) device, formed as a die, has a layered structure including a p+ layer (e.g., a substrate), an n&#x2212; epi layer, a p-well, vertical insulated gate regions formed in the p-well, and n+ regions between the gate regions, so that vertical NPN and PNP transistors are formed. The device is formed of a matrix of cells. To turn the device on, a positive voltage is applied to the gate, referenced to the cathode. The cells further contain a vertical p-channel MOSFET, for shorting the base of the NPN transistor to its emitter, to turn the NPN transistor off when the p-channel MOSFET is turned on by a slight negative voltage applied to the gate. This allows the IGTO device to be more easily turned off while in a latch-up condition, when the device is acting like a thyristor.

Insulated gate turn-off device with turn-off transistor

An insulated gate turn-off (IGTO) device, formed as a die, has a layered structure including a p+ layer (e.g., a substrate), an n&#x2212; epi layer, a p-well, vertical insulated gate electrodes formed in the p-well, and n+ regions between the gate electrodes, so that vertical npn and pnp transistors are formed. The device is formed of a matrix of cells. To turn the device on, a positive voltage is applied to the gate electrodes, referenced to the cathode. The cells further contain a vertical p-channel MOSFET, for shorting the base of the npn transistor to its emitter, to turn the npn transistor off when the p-channel MOSFET is turned on by a slight negative voltage applied to the gate. The p-channel MOSFET includes a Schottky source formed in the top surface of the npn transistor emitter.

Insulated gate turn-off device with turn-off Schottky-Barrier MOSFET

An insulated gate turn-off (IGTO) device has a PNPN layered structure so that vertical NPN and PNP transistors are formed. Trench gates are formed extending into the intermediate P-layer. The device is formed of an array of cells. A P-channel MOSFET, having a trenched gate, is formed in some of the cells. The control terminal of the IGTO device is connected to the insulated gates of all cells, including to the gate of the P-channel MOSFET, and to the intermediate P-layer. To turn the device on, a positive voltage is applied to the control terminal to turn on the NPN transistor by forward biasing its base-emitter. To turn off the IGTO device, a negative voltage is applied to the control terminal to turn on the P-channel MOSFET to short the NPN base to its emitter.

Insulated gate power device using a MOSFET for turning off

An insulated gate turn-off thyristor has a layered structure including a p+ layer (e.g., a substrate), an n-epi layer, a p-well, vertical insulated gate regions formed in the p-well, and an n-layer over the p-well and between the gate regions, so that vertical npn and pnp transistors are formed. The p-well has an intermediate highly doped portion. When the gate regions are sufficiently biased, an inversion layer surrounds the gate regions, causing the effective base of the npn transistor to be narrowed to increase its beta. When the product of the betas exceeds one, controlled latch-up of the thyristor is initiated. The p-well's highly doped intermediate region enables improvement in the npn transistor efficiency as well as enabling more independent control over the characteristics of the n-type layer (emitter), the emitter-base junction characteristics, and the overall dopant concentration and thickness of the p-type base.

Vertical insulated gate turn-off thyristor with intermediate p+ layer in p-base

An insulated gate turn-off thyristor has a layered structure including a p+ layer (e.g., a substrate), an n&#x2212; layer, a p-well, vertical insulated gate regions formed in the p-well, and n+ regions between the gate regions, so that vertical NPN and PNP transistors are formed. Some of the gate regions are first gate regions that only extend into the p-well, and other ones of the gate regions are second gate regions that extend through the p-well and into the n&#x2212; layer to create a vertical conducting channel when biased. The second gate regions increase the beta of the PNP transistor. When the first gate regions are biased, the base of the NPN transistor is narrowed to increase its beta. When the product of the betas exceeds one, controlled latch-up of the thyristor is initiated. The distributed second gate regions lower the minimum gate voltage needed to turn on the thyristor.

Dual depth trench-gated mos-controlled thyristor with well-defined turn-on characteristics

An insulated gate turn-off (IGTO) device has a layered structure including a p+ layer (e.g., a substrate), an n-type layer, a p-type layer (which may be a p-well), n+ regions formed in the surface of the p-type layer, and insulated planar gates over the p-type layer between the n+ regions. The layered structure forms vertical NPN and PNP transistors. The p-type layer forms the base of the NPN transistor. When the gates are sufficiently positively biased, the underlying p-type layer inverts to reduce the width of the base to increase the beta of the NPN transistor. This causes the product of the betas of the NPN and PNP transistors to exceed one, and the device becomes fully conductive. When the gate voltage is removed, the base width increases such that the product of the betas is less than one, and the device shuts off. No latch-up occurs in normal operation.

Vertical insulated-gate turn-off device having a planar gate

A lateral insulated gate turn-off (IGTO) device includes an n-type layer, a p-well formed in the n-type layer, a shallow n+ type region formed in the well, a shallow p+ type region formed in the well, a cathode electrode shorting the n+ type region to the p+ type region, at least one trenched gate extending through the n+ type region and into the well, a p+ type anode region laterally spaced from the well, and an anode electrode electrically contacting the p+ type anode region. The structure forms a lateral structure of NPN and PNP transistors, where the well forms the base of the NPN transistor. When a turn-on voltage is applied to the gate, the p-base has a reduced width, resulting in the beta of the NPN transistor increasing beyond a threshold to turn on the IGTO device by current feedback.

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Miyagi, Japan

Hidenori Akiyama