Other

Shimadzu Corporation

Japan Science and Technology Agency

Hideki Muto

Kazuaki Sawada

Makoto Ishida

Takeharu Etoh

Yuki Maruyama

A method for measuring incident light employing a simple semiconductor structure provided with a single electron-capturing section corresponding to incident light, and a sensor having a spectroscopic mechanism employing the same are provided. A spectroscopic sensor includes a semiconductor substrate (), a first diffusion layer () provided on the semiconductor substrate (), a second diffusion layer ()provided at a part of the first diffusion layer (), and an electrode ()film provided on the first diffusion layer () with an insulating film () provided therebetween, the electrode film () transmitting the incident light and being applied with a gate voltage. In the spectroscopic sensor, the gate voltage is varied, the depth (position) for capturing electrons generated in the first diffusion layer () by the incident light is varied so as to correspond to the gate voltage, and a current indicating the quantity of the electrons is measured. Thereby, wavelength and intensity of the incident light are measured.

Measuring method of incident light and sensor having spectroscopic mechanism employing it

A back-illuminated image sensor has a converting layer, charge collecting portions, and suppressing regionsand. The converting layerfor converting an incident beam into signal charges is formed on one side of an incident faceon which an incident beam is irradiated. The converting layeris provided for each of pixels arranged in two dimensions. The charge collecting portionsfor collecting signal charges generated in the converting layerextends from the converting layerto a surfaceopposite to the incident face. The suppressing regionsandfor suppressing the flow of the signal charges from the converting layerto peripheral circuitsis formed between the converting layerand the peripheral circuits

Back-illuminated image device having signal charges suppressing region

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Odawara, Japan

Hideki Muto