Kurita Water Industries Ltd.

Hideaki Iino

Mitsuharu Terashima

Mamoru Iwasaki

The dilute chemical solution supply device () comprises: a dilute chemical solution preparation unit () that prepares a dilute chemical solution (W); a reservoir () for the prepared dilute chemical solution; a dilute chemical solution adjustment/supply mechanism () that supplies, as washing water (W), the dilute chemical solution (W) stored in the reservoir () to a plurality of single-wafer type washers (A,B, andC); and a return mechanism that is connected to each of the single-wafer type washers (A,B, andC) and refluxes excess water from the single-wafer type washers to the reservoir (). According to such a dilute chemical solution supply device, it is possible to accurately adjust the concentration of the solute of the dilute chemical solution and suppress the discharge of excess water, and the dilute chemical solution supply device is thus suitable for washing of wafers, etc.

Dilute chemical supply device

Provided are a method for supplying water of specified concentration, including: a step of adding at least two liquids, a conductive first liquid and a non-conductive second liquid, to ultrapure water to produce water of specified concentration containing a first liquid-component and a second liquid-component at specified concentrations, in which a mixed solution in which the first liquid and the second liquid are mixed at a specified mixing ratio in advance is prepared; and the mixed solution is added to the ultrapure water so that a conductivity or specific resistance of the ultrapure water after the addition satisfies a specified value, and an apparatus therefor.

Method and apparatus for supplying water of specified concentration

Provided is a desalting device which includes a tower body and a bulge portion bulging downward therefrom, and which prevents uneven flow and causes no dead space within the tower body. The desalting device includes a tower body having a bulge portionbulging downward at a bottom portion thereof, an ion-exchange resin packed in the tower body, and a plurality of strainersfor collecting water being arranged within the bulge portion. The strainers are arranged only in a central region of an inside of the bulge portion excluding an outer peripheral portion of the bulge portion.

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Tokyo, Japan

Hideaki Iino