United Microelectronics Corp.

Hermen Liu

Yimin Huang

Kun-Chih Wang

Kai-Kuang Ho

Paul Chen

Min-Chih John Hsuan

Shing-Ren Sheu

Kuo-Ming Chen

Gino J Shian

A pre-process before cutting a wafer is described. The wafer includes a plurality of scribe lines and a plurality of dies defined by the scribe lines, and a material layer covers the wafer. A pre-processing step is performed to remove the material layer on the scribe lines close to the corner regions of the dies. Removing the material layer at the corner regions before cutting the wafer is able to preserve the integrity of the corner regions of the cut dies.

Pre-process before cutting a wafer and method of cutting a wafer

The present invention relates to a method for manufacturing a wafer level chip scale package structure including the following steps. After providing a glass substrate and a wafer comprising a plurality of chips, the active surface of the wafer is connected to the top surface of the glass substrate. The wafer is connected with the glass substrate through either bumps or pads thereon. After drilling the glass substrate to form a plurality of through holes, a plating process is performed to form a plurality of via plugs in the through holes. Afterwards, a singulation step is performed and a plurality of chip scale package structures is obtained.

Method for manufacturing wafer level chip scale package structure

A method of conducting a laser repair operation. A silicon wafer has a plurality of chips thereon. Each chips has a plurality of bonding pads, a plurality of testing pads, a plurality of fuses and a passivation layer for protecting the chips. The passivation layer exposes the bonding pads and the testing pads. A bump-forming process is conducted to form a bottom metallic layer and a bump sequentially over each bonding pad. Only a bottom metallic layer is formed over each testing pad. The bumps are formed, for example, by electroplating or printing. Testing is carried out by probing various bottom metallic layers above the testing pads. Finally, a laser repair is conducted.

Laser repair operation

A method of conducting a laser repair operation. A silicon wafer has a plurality of chips thereon. Each chip has a plurality of bonding pads, a plurality of testing pads, a plurality of fuses and a passivation layer for protecting the chip. The passivation layer exposes the bonding pads and the testing pads. A bump-forming process is conducted to form a bottom metallic layer and a bump sequentially over each bonding pad. Only a bottom metallic layer is formed over each testing pad. The bumps axe formed, for example, by electroplating or printing. Testing is carried out by probing various bottom metallic layers above the testing pads. Finally, a laser repair is conducted.

A method of conducting a laser repair operation. A silicon wafer has a plurality of chips thereon. Each chip has a plurality of bonding pads, a plurality of testing pads, a plurality of fuses and a passivation layer for protecting the chip. The passivation layer exposes the bonding pads an the testing pads. A bump-forming process is conducted to form a bottom metallic layer and a bump sequentially over each bonding pad. Only a bottom metallic layer is formed over each testing pad. The bumps are formed, for example, by electroplating or printing. Testing is carried out by probing various bottom metallic layers above the testing pads. Finally, a laser repair is conducted.

A bonding pad structure of semiconductor device having improved bondability is disclosed. The bonding pad structure uses at least one level comprising conductive islands and conductive plugs used as fasteners to prevent the bonding pad layer from peeling and cracking during the bonding process.

Bonding pad structure of semiconductor device having improved bondability

An interlace grid array package structure and method of manufacture that utilizes a single sided molding method whose connection with an integrated circuit board is through the underside of the package's plastic body. Therefore, only the alternating contact points arranged into a grid array are exposed for connection after a surface mount operation. Hence, the leads of a lead frame are not protrudent. Therefore, the problem of bent leads is eliminated and the overall package area and thickness is reduced. Since the alternating contact point design of a grid array package increases connection pitch, short-circuiting of neighboring contact points is greatly reduced and a higher yield is obtained.

Cross grid array package structure and method of manufacture

The present invention provides a bonding pad on a semiconductor chip such that peeling of bonding pads during interconnection in the packaging process is avoided. The bonding pad is used to electrically connect an integrated circuit in the semiconductor chip with an external circuit. The semiconductor chip comprises a first dielectric layer positioned in a predetermined area on the surface of the semiconductor chip, a second dielectric layer positioned on the surface of the semiconductor chip outside the predetermined area wherein the first dielectric layer is harder than the second dielectric layer, and a bonding pad positioned on the first dielectric layer for electrically connecting anintegrated circuit (IC) in the semiconductor chip with an external circuit.

Bonding pad on a semiconductor chip

The present invention provides a method of forming a bonding pad on a semiconductor chip such that peeling of bonding pads during interconnection in the packaging process is avoided. The bonding pad is used to electrically connect an integrated circuit in the semiconductor chip with an external circuit. The method comprises forming a first dielectric layer at a predetermined area on the surface of the semiconductor chip, forming a second dielectric layer on the surface of the semiconductor chip outside the predetermined area wherein the first dielectric layer is harder than the second dielectric layer, and forming the bonding pad on the first dielectric layer.

Method of forming a bonding pad on a semiconductor chip

A multi-chip semiconductor package is described. By changing the design for a lead frame, two or more chips are packaged together. A die pad whose surface area is smaller than that of a chip is used so that bonding pads can be exposed and chips can mounted with the same direction. Therefore, wires are not crossed during wire bonding. Thus, chips do not need additional treatment. Performance and density of the package can be enhanced without increasing capital expenditure. Device integration is also increased.

Multi-chip semiconductor package

The present invention provides a semiconductor chip. The semiconductor chip comprising an integrated circuit (IC) positioned within the semiconductor chip, and a bonding pad positioned on the surface of the semiconductor chip and electrically connected with the IC. The method comprises using a probe to contact a predetermined testing area on the surface of the bonding pad to electrically test the IC, and forming a passivation layer on the surface of the semiconductor chip to passivate the surface of the semiconductor chip. The testing area of the bonding pad is covered under the passivation layer and the passivation layer comprises an opening positioned on the bonding pad outside the testing area which is used as a connecting area for performing wire bonding or bumping.

Semiconductor chip

The present invention provides a method of testing and packaging a semiconductor chip. The semiconductor chip includes an integrated circuit (IC) positioned within the semiconductor chip, and a bonding pad positioned on the surface of the semiconductor chip and electrically connected with the IC. The method includes using a probe to contact a predetermined testing area on the surface of the bonding pad to electrically test the IC, and forming a passivation layer on the surface of the semiconductor chip to passivate the surface of the semiconductor chip. The testing area of the bonding pad is covered under the passivation layer and the passivation layer has an opening positioned on the bonding pad outside the testing area which is used as a connecting area for performing wire bonding or bumping.

Method of testing and packaging a semiconductor chip

A trench style bump and the application of the same. A trench style bump is formed on a silicon chip. The silicon chip is laminated on a substrate which has a circuit built inside and an anisotropic conductive film/anisotropic conductive paste formed thereon. During lamination, an ultra sonic wave is used to vibrate the substrate laterally, so that the conductive particles contained within the anisotropic conductive film/anisotropic conductive past are effectively trapped by the trench on the trench style bump.

Trench style bump and application of the same

A method of testing a ball grid array (BGA) integrated circuit (IC) package such that no solder balls are attached to the BGA IC package when burn-in testing using a burn-in testing socket is carried out. In this method, landings on the substrate of the BGA IC package directly contact the test contacts of the burn-in testing socket. Furthermore, the substrate of the BGA IC package is cleaned with hydrogen peroxide solution before solder balls are attached onto the landings of the BGA IC substrate.

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Taoyuan Hsien, Taiwan

Hermen Liu