Carl-zeiss-smt Ag

Heinz Mann

Wolfgang Singer

Hubert Holderer

Markus Weiss

Frank Melzer

Andreas Seifert

Andreas Heisler

Berndt Warm

Stefan Dornheim

Jurgen Faltus

Jürgen Faltus

A facet mirror () is provided with a number of mirror facets (), in which the mirror facets () respectively have a spherical or conical facet body () with a reflecting surface (). The side of the facet body () averted from the reflecting surface () is mounted in a bearing device ().

Facet mirror having a number of mirror facets

In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.

Growing community of inventors

Aalen, Germany

Heinz Mann