Samsung Electronics Co., Ltd.

Hee-Ho Ku

Yong-Kug Bae

Sung-won Choi

Young-sik Park

Yi-Gwon Kim

Ga-Hyun Yang

A semiconductor device includes a substrate including at least two semiconductor chip regions and a scribe lane region disposed between the semiconductor chip regions. The semiconductor device additionally includes a first optical measurement pattern disposed on the substrate. The semiconductor device further includes a second optical measurement pattern disposed on an upper layer of the first optical measurement pattern, the second optical measurement pattern being spaced apart from the first optical measurement pattern. The semiconductor device additionally includes a three-dimensional (3D) shielding structure surrounding the first optical measurement pattern and including an electrically conductive material.

Growing community of inventors

Hwaseong-si, South Korea

Hee-Ho Ku