Intel Corporation

Harry Gomez

Annalisa Cappellani

Tahir Ghani

Abhijit Jayant Pethe

Mark T Bohr

Rafael Rios

Kelin J Kuhn

Clair C Webb

Jack T Kavalieros

Anand S Murthy

Stephen M Cea

Aaron D Lilak

Seiyon Kim

Patrick H Keys

Mayank Sahni

Bernhard Sell

Kuan-Yueh Shen

Clair Webb

Gate contact structures disposed over active portions of gates and methods of forming such gate contact structures are described. For example, a semiconductor structure includes a substrate having an active region and an isolation region. A gate structure has a portion disposed above the active region and a portion disposed above the isolation region of the substrate. Source and drain regions are disposed in the active region of the substrate, on either side of the portion of the gate structure disposed above the active region. A gate contact structure is disposed on the portion of the gate structure disposed above the active region of the substrate.

Gate contact structure over active gate and method to fabricate same

Strained gate-all-around semiconductor devices formed on globally or locally isolated substrates are described. For example, a semiconductor device includes a semiconductor substrate. An insulating structure is disposed above the semiconductor substrate. A three-dimensional channel region is disposed above the insulating structure. Source and drain regions are disposed on either side of the three-dimensional channel region and on an epitaxial seed layer. The epitaxial seed layer is composed of a semiconductor material different from the three-dimensional channel region and disposed on the insulating structure. A gate electrode stack surrounds the three-dimensional channel region with a portion disposed on the insulating structure and laterally adjacent to the epitaxial seed layer.

Gate-all-around (GAA) transistors with nanowires on an isolation pedestal

Gate-all-around (GAA) transistor with stacked nanowires on locally isolated substrate

Semiconductor devices with isolated body portions are described. For example, a semiconductor structure includes a semiconductor body disposed above a semiconductor substrate. The semiconductor body includes a channel region and a pair of source and drain regions on either side of the channel region. An isolation pedestal is disposed between the semiconductor body and the semiconductor substrate. A gate electrode stack at least partially surrounds a portion of the channel region of the semiconductor body.

Semiconductor device with isolated body portion

Isolated and bulk semiconductor devices formed on a same bulk substrate and methods to form such devices are described. For example, a semiconductor structure includes a first semiconductor device having a first semiconductor body disposed on a bulk substrate. The first semiconductor body has an uppermost surface with a first horizontal plane. The semiconductor structure also includes a second semiconductor device having a second semiconductor body disposed on an isolation pedestal. The isolation pedestal is disposed on the bulk substrate. The second semiconductor body has an uppermost surface with a second horizontal plane. The first and second horizontal planes are co-planar.

Isolated and bulk semiconductor devices formed on a same bulk substrate

Methods for fabricating strained gate-all-around semiconductor devices by fin oxidation using an undercut etch-stop layer

Strained gate-all-around semiconductor devices formed on globally or locally isolated substrates

A channel strained multi-gate transistor with low parasitic resistance and method of manufacturing the same. A gate stack may be formed over a semiconductor fin having a gate-coupled sidewall height (H), an etch rate controlling dopant may be implanted into a source/drain region of the semiconductor fin adjacent to the gate stack and into a source/drain extension region of the semiconductor fin. The doped fin region may be etched to remove a thickness of the semiconductor fin equal to at least Hproximate a channel region and form a source/drain extension undercut. A material may be grown on the exposed semiconductor substrate to form a regrown source/drain fin region filling the source/drain extension undercut region.

Multi-gate semiconductor device with self-aligned epitaxial source and drain

A method of forming a transistor with self-aligned source and drain extensions in close proximity to a gate dielectric layer of the transistor comprises forming a gate stack on a substrate, implanting a dopant into regions of the substrate adjacent to the gate stack, wherein the dopant increases the etch rate of the substrate and defines the location of the source and drain extensions, forming a pair of spacers on laterally opposite sides of the gate stack that are disposed atop the doped regions of the substrate, etching the doped regions of the substrate and portions of the substrate subjacent to the doped regions, wherein an etch rate of the doped regions is higher than an etch rate of the portions of the substrate subjacent to the doped regions, and depositing a silicon-based material in the etched portions of the substrate.

Semiconductor device having self-aligned epitaxial source and drain extensions

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Hillsboro, OR, United States of America

Harry Gomez