Mitutoyo Corporation

Solarge Holding B.v.

Harm Visscher

Johannes Anna Quaedackers

Adriaan Tiemen Zuiderweg

Huibert Johan Van Den Heuvel

Menno Nicolaas Van Den Donker

Emmanuel Wilhelmus Johannes Leonardus Oomen

Roeland Leonardus Hubertus Maria Verlaek

Method for measuring a height map of a test, including measuring a coarse height map of the test surface with a pre-map sensor provided to an optical profiler with a relatively long working distance and/or a large field of view, storing the coarse height map in a memory, subdividing the coarse height map into sections appropriate for the field of view of a high resolution optical profiler sensor provided to the optical profiler, calculating corresponding X, Y and Z positions for the optical profiler sensor with respect to the test surface, calculating a trajectory in the X, Y, Z-direction for the optical profiler sensor with respect to the test surface using the calculated X, Y, Z-positions, moving the optical profiler in the X, Y, Z-direction with respect to the test surface according to the trajectory, and measuring a high accuracy height map with the high resolution optical profiler sensor.

Method for measuring a high accuracy height map of a test surface

Growing community of inventors

Tilburg, Netherlands

Harm Visscher