Yangtze Memory Technologies Co., Ltd.

Hanwei Yi

Hongbin Zhu

Xiaofen Zheng

Lixun Gu

Methods for forming channel structures in 3D memory devices are disclosed. In one example, a memory film and a sacrificial layer are subsequently formed along a sidewall and a bottom of a channel hole. A protective structure covering a portion of the sacrificial layer along the sidewall of the channel hole is formed. A portion of the sacrificial layer at the bottom of the channel hole that is not covered by the protective structure is wet etched. A portion of the memory film at the bottom of the channel hole that is not covered by a remainder of the sacrificial layer is wet etched.

Methods for forming channel structures with protective structure in three-dimensional memory devices

Methods for forming channel structures in 3D memory devices are disclosed. In one example, a memory film and a sacrificial layer are subsequently formed along a sidewall and a bottom of a channel hole. A protective structure covering a portion of the sacrificial layer along the sidewall of the channel hole is formed. A portion of the sacrificial layer at the bottom of the channel hole that is not covered by the protective structure is selectively removed. A portion of the memory film at the bottom of the channel hole that is not covered by a remainder of the sacrificial layer is selectively removed.

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Wuhan, China

Hanwei Yi