Leybold-heraeus Gmbh

Leybold Aktiengesellschaft

Leybold-heraeus Gmbh & Co. Kg

Leybold-hereaus Gmbh

Hans Aichert

Herbert Stephan

Walter Dietrich

Friedrich Stark

Otto-Horst Hoffmann

Alfred Hauff

Jorg Kieser

Reiner Kukla

Joseph Heimerl

Dan M Goebel

Volker Bauer

Klaus Hartig

Anton Dietrich

Horst Ranke

Albert Feuerstein

Rainer Gegenwart

Rainer Ludwig

Robert W Conn

Gregor A Campbell

Rolf Adam

Michael Kiessling

Peter Sommerkamp

Gonde Dittmer

Otto-Horst Hoffman

Hans Betz

Max Mayr

Friedrich Hass

Klaus Wilmes

Alfred Thelen

Hermann Stumpp

Cathode sputtering apparatus having a hollow cathode on the magnetron principle with a cathode base (5) in which a hollow target (9) with a cylindrical sputtering surface (10) and a cylindrical outer surface is disposed. The cathode base (5) has a cooling passage (6). The target is externally surrounded by a magnet system (18) with magnet poles for the production of a rotationally symmetrical tunnel of magnetic lines of force closed on the circumference and over the sputtering surface. Outside of the space surrounded by the sputtering surface (10) there is disposed at least one anode (3, 4). A transport path for a substrate to be coated passes through the target (9) and the at least one anode. The cooling passage (6) is sealed off from the target (9) by a wall (7). Due to a narrow clearance, as soon as the target (9) reaches its operating temperature it comes in thermal contact with the wall (7). The [north] pole faces (N) of the magnet system (18) are on one side and the other [south] pole faces (S) lie on the other side of the end faces of the target (9) and radially on a radius which is equal to or greater than the radius of the sputtering surface (10). The magnet system (18) is held at a freely adjustable ('floating') potential in operation by insulating spaces (11, 19, 10).

Cathode sputtering apparatus on the magnetron principle with a hollow

An apparatus to apply materials to a substrate disposed in a vacuum chamber is disclosed. A separate generator chamber containing an electron emitter is connected to the vacuum chamber by a process chamber so that a plasma of controllable cross-sectional shape and large area is formed and guided by magnets toward a target system. Positive ions may be accelerated against the target by applying an adjustable negative voltage.

Method and apparatus for the application of materials

Melting furnace (1) for the production of strand-cast ingots (17, 18) in a protective gas atmosphere, has a charging apparatus (8) for feeding starting material (11) into a melting area (14). Within a melting chamber provided with a chamber floor (2d) and at least one energy source (4,5) there is situated a strand-casting mold (15) for the transformation of the melt to an ingot (17, 18) and underneath the strand-casting mold is disposed an offbearing apparatus (25) for offbearing the ingot, and an offbearing chamber enveloping the ingot and the offbearing apparatus. To solve the problem of operating such a melting furnace virtually continuously, the strand-casting mold (15) together with at least one additional strand-casting mold (16) is disposed in the chamber flow (2d) in such a manner that each of the strand-casting molds (15, 16) can be brought into the drop path of the melt by a preferably horizontal relative movement. Furthermore, one offbearing apparatus (25, 26) and one offbearing chamber (23, 24) are associated with each strand-casting mold, and at least one vacuum valve (19, 20) is disposed between each strand-casting mold (15, 16) and the offbearing chamber (23, 24) associated with it. Preferably the strand-casting molds (15, 16) are disposed in a chamber floor (2d) configured as a turning disk.

Melting furnace for producing strand-cast ingots in a protective gas

In vacuum depositing apparatus, especially for the manufacture of magnetic tapes, a substrate holder is disposed in the form of a cooling cylinder, and in the path of the vapor stream there is a mask for the purpose of geometrically restricting the vapor stream. In order to prevent any condensation of vaporized material in solid form, the surface of the mask facing the vapor stream is not aligned horizontally, and its lowermost edge lies within the projected surface of the crucible opening. The surface of the mask can be heated up to a temperature that is between the vaporizing temperature and the solidification temperature of the vaporized material. In an especially advantageous manner, the surface of the mask is formed by tiles of a ceramic material.

Vacuum depositing apparatus

A magnetron cathode for sputtering ferromagnetic targets. The magnet system consists of magnet poles of opposite polarity lying one within the other disposed on a basic cathode body. Between the target and the pole shoes, which consist of target material, two circumferential air gaps in the direction of the depth of the system are formed. The surfaces of projection of the magnet poles and target do not overlap. For the purpose of making the target ablation uniform while simultaneously achieving high sputtering rates, the pole shoes are separated, in accordance with the invention, each by a distance S from the magnet poles. The magnet poles lie in an area which runs from a plane passing through the sputtering surface in the direction of the depth of the system. Between the pole shoes and the target, on the one hand, and the magnet poles on the other, there is disposed a thermally conductive metal body which is in communication with at least one coolant passage and consists of a nonferromagnetic material.

Magnetron cathode for sputtering ferromagnetic targets

High-purity metal powder is made by the electron beam melting of a starting material in rod form in a vacuum wherein the molten metal is momentarily caught on a spinning plate rotating at high speed and flung therefrom and thereafter solidified by cooling. The metal on the spinning plate is bombarded with an electron beam that is so focused and periodically deflected that its focal spot is many times smaller than the diameter of the spinning plate. The beam deflection between the rotational center of the spinning plate and its marginal area is performed such that the spinning plate is scanned in a zone that extends radially of the axis of rotation of the spinning plate and is small in relation to its diameter. Cooling of the metal particles to the point of solidification is accomplished by radiation loss.

Apparatus for the production of high-purity metal powder by means of

Coupling valve for joining stationary and movable evacuatable chambers having confronting chamber walls displaced parallel with respect to each other. A first frame is fastened to one chamber wall and is joined by a resilient member to a second movable frame which can be brought into engagement with the other chamber wall. The movable frame is provided with at least one actuator by which it can be tightened against the confronting chamber wall.

Coupling for stationary and movable vacuum chambers

Method and apparatus for vacuum depositing thin films on substrates which are located above 500.degree. C. by electron beam heating during the deposition. The substrates are positioned above an evaporating crucible filled with a bath of the material being evaporated which is also heated by electron beams. The electron beams are deflected at an angle of less than 80.degree. onto approximately one-half of the bath surface situated between the axis of symmetry and the end of the evaporating crucible.

Method and apparatus for vacuum depositing thin coatings using electron

Method for vaporizing alloys containing metals having different vapor pressures from elongated vaporizing crucibles which are fed with the alloy to be vaporized in rod form at several points along the length of the crucible. The alloy is vaporized by direct bombardment of the molten bath surface with electron beams periodically deflected according to a pattern for the deposition of the alloy coating material on a plurality of substrates positioned above the vaporizing crucible. The proportional composition of the alloy to be vaporized is regulated differently over the length of the crucible such that the alloy component with the lowest boiling point (or the highest vapor pressure) is in a smaller proportion in the alloy to be vaporized which is fed to the center of the vaporizing crucible than in the alloy fed to the ends of the vaporizing crucible.

Method of vaporizing alloys of metals having different vapor pressures

Method for vacuum depositing corrosion and oxidation resistant alloy coatings on turbine buckets having leading edges and trailing edges, with simultaneous rotation of the turbine buckets about their longitudinal axis in a vapor stream above a vapor source. The time of stay of each element of the surface above the vapor source is varied during a 360.degree. rotation such that it is shortest when the leading edges and the trailing edges are pointed towards the vapor source and longest when the concave and convex flanks are presented to it.

Method for vapor-coating turbine buckets

Method for evaporating melts of alloys of metals of different vapor pressures from continuously fed, large-area evaporating crucibles by direct bombardment of the bath surface with focused electron beams which are periodically deflected according to a pattern. The alloy material is deposited on a plurality of substrates such as turbine blades which are positioned in a field above the evaporating crucible with local adaptation of the energy density to the thermal economy of the melt bath. At least one electron beam is deflected onto at least two substantially rectangular beam fields and is guided in each of these fields through a line raster at a frequency of at least 100 Hz while shifting periodically from one to the other field with a shift frequency of at most 5 Hz.

Method of evaporating melts of alloys of metals having different vapor

Pass-through heating device for vacuum coating apparatus having a heating chamber with at least one heating device, a thermal barrier positioned between the walls of the heating chamber and the heating device parallel to the longitudinal axis of the coating apparatus.

Heating system for vacuum coating apparatus

Method for the production of high-purity metal powder by means of

Evaporating crucible having a crucible floor and a peripheral rim therearound. The floor has a plurality of floor apertures for feeding a plurality of rods of evaporating material and, surrounding the floor apertures, superelevations are provided whereby the distance from the crucible floor to the maximum fill level of the evaporating material is reduced by at least fifteen percent.

Evaporating crucible

Vacuum apparatus for coating substrates by rotation including a vacuum chamber with an elongated material source having a longitudinal axis and a transverse axis, a substrate rack with a plurality of fastening points for the planar arrangement of a plurality of substrates above the material source in a substantially uniform distribution over its surface and a drive associated with the substrate rack for rotating substrates. The substrate rack has to parallel substrate bearers disposed fork-wise with couplings for the substrates positioned on the confronting inner sides of the substrate bearers. The substrate bearers are connected by angle drives to the substrate couplings and a motor via a drive shaft.

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Hanau am Main, Germany

Hans Aichert