Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh (1 from 156 patents)
1 patent:
1. 10991544 - Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen