Kimmon Manufacturing Co., Ltd.

Kimmon Quartz Co., Ltd.

Other

Sharp Kabushiki Kaisha Corporation

Kimmon Manufacturing Co., Ltd. and Mitsubishi Chemical Corporation

Hajime Onoda

Hiroshi Ota

Wataru Sato

Akira Utsunomiya

Tetsuya Tarui

Masaru Shimoyama

Kazumi Kimura

Kazutoshi Watanabe

Hiromitsu Asano

Hiroki Takahashi

Kunio Arakawa

In a gas meter, a measuring diaphragm is provided inside a measuring chamber, the measuring diaphragm is caused to reciprocate according to a gas pressure of gas flowing from a gas inflow port to the measuring chamber, and the reciprocation of the measuring diaphragm is interlocked with a valve mechanism and an integrating mechanism via a wing shaft and a crank mechanism. Here, the measuring diaphragm is formed in an elliptical shape which is horizontally long in the width direction of the gas meter.

Diaphragm gas meter

A drying apparatus comprises a drying vessel, a treatment liquid feeder-discharger for feeding pure water into the drying vessel, a vapor supplier for supplying an organic solvent vapor to the space over the pure water, inert gas suppliers for supplying an inert gas with which the organic solvent vapor is diluted, and a heated organic solvent supplier for forming a film of the organic solvent on a liquid level of the pure water. After the wafer is immersed in the pure water, the pure water is gradually discharged from the drying vessel by means of the treatment liquid feeder-discharger. Since the wafer passes through the organic solvent film as it is exposed above the liquid level, the organic solvent of the film adheres to the surface of the wafer, and the organic solvent vapor is condensed on the surface of the wafer that is exposed above the liquid level.

Drying apparatus and drying method

A substrate drying apparatus comprises a treatment vessel for containing IPA in the form of liquid, an IPA source for supplying IPA into the treatment vessel, a first heat exchanger which is equipped with a heat exchanger tube dipped in IPA and allowing steam to pass therein, the first heat exchanger allowing the steam and IPA to perform heat exchange therebetween to thereby evaporate IPA, and a second heat exchanger provided on or above an upper portion of the treatment vessel and equipped with a heat exchanger tube for allowing a coolant to pass therein, the second heat exchanger allowing the coolant and the evaporated IPA to perform heat exchange therebetween to thereby condense the evaporated IPA.

Substrate drying apparatus

Synthetic quartz glass powder is produced by (a) hydrolyzing an alkoxysilane to form a gel, (b) finely dividing the gel and then drying, or drying the gel and then finely dividing, and (c) calcining the obtained powder, the powder being maintained under an atmosphere with an oxygen concentration of not less than 30 vol % during at least a part of the calcining period at a temperature of not lower than 1,000.degree. C.

Process for producing synthetic quartz glass powder

An automatic power generation type flowmeter generates a measuring signal through measuring of a flow rate of fluid flowing through a passage and transmits it to a receiver at a remote location. The flowmeter includes a power generator coupled to a detection shaft rotated under an action of a fluid flowing through the passage and outputting an electric signal. The power generator includes a permanent magnet having S- and N-poles, an electromagnetic coil having a core around its axis and arranged adjacent to the magnet with the axis of the coil located in a direction substantially perpendicular to a rotation shaft, a first stator magnetically coupled to the core and having its magnetic induction portion arranged opposite to the N-pole of the magnet, and a second stator magnetically connected to the core and having its magnetic induction portion arranged opposite to the S-pole of the magnet.

Automatic power generation type flowmeter

In a flow meter, a cylindrical member containing therein a vane wheel is fitted in a measuring chamber of a casing so as to be closely in contact with the peripheral wall of the casing, and a cover is put on the cylindrical member. Rectangular inlet and outlet nozzles in a side wall portion of the cylindrical member communicate with inlet and outlet ports of the casing, respectively. A pivot supporting the vane wheel is replaceably attached to a bottom portion of the cylindrical member. A supporting shaft of the vane wheel extends upward through a center opening in the cover to be connected to a measuring mechanism.

Flow meter

A flow meter comprises a fan wheel provided in a passage of a running fluid to be rotated thereby; a composite magnetic wire formed of a core and shell and fitted to the fan wheel; a pair of mutually facing permanent magnets arranged substantially in parallel above a plane through which the composite magnetic wire is rotated, with the poles of the opposite polarities set adjacent to each other; a magnetic core wound with a coil and disposed between the paired permanent magnets, and wherein, when the composite wire faces one of the paired permanent magnets, the alignment direction of the respective magnetic domains of the core of the composite magnetic wire is changed, and when the composite wire faces the other of the paired permanent magnets, the respective magnetic domains of the core of the composite magnetic wire regains the alignment direction before said change. Therefore, when the composite magnetic wire passes below the paired permanent magnets, pulses are generated in the coil; pulses thus generated are counted by a counter; a counted number of pulses is converted into a signal denoting a detected flow of a running fluid; and the converted signal is registered and indicated on a display device.

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Tokyo, Japan

Hajime Onoda