At&s (china) Co. Ltd.

Haina Wu

Seok Kim Tay

Abderrazzaq Ifis

A method includes providing an electrically conductive layer structure on top of an electrically insulating layer structure, forming a window in the electrically conductive layer structure and removing material of the electrically insulating layer structure below the window by a first laser beam, and subsequently removing further material of the electrically insulating layer structure below the window by a second laser beam having a smaller size than a size of the window.

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Peixian, China

Haina Wu