United States of America As Represented by the Administrator of Nasa

H Frank Greer

Michael E Hoenk

Shouleh Nikzad

Todd J Jones

Richard P Vasquez

Matthew R Dickie

A process for removing indium oxide from indium bumps in a flip-chip structure to reduce contact resistance, by a multi-step plasma treatment. A first plasma treatment of the indium bumps with an argon, methane and hydrogen plasma reduces indium oxide, and a second plasma treatment with an argon and hydrogen plasma removes residual organics. The multi-step plasma process for removing indium oxide from the indium bumps is more effective in reducing the oxide, and yet does not require the use of halogens, does not change the bump morphology, does not attack the bond pad material or under-bump metallization layers, and creates no new mechanisms for open circuits.

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Pasadena, CA, United States of America

H Frank Greer