Texas Instruments Corporation

Guruvayurappan Mathur

Poornika Fernandes

Bhaskar Srinivasan

Abbas Ali

Alexei Sadovnikov

Scott William Jessen

David Matthew Curran

Akram Ali Salman

John Kenneth Arch

Paul Stulik

Ye Shao

Shih Chang Chang

Chin-yu Tsai

Russell Duane Fields

Ryo Tsukahara

Thomas Terrance Lynch

Natalia Lavrovskaya

Stephen Arlon Meisner

Shariq Arshad

Stephen Arion Meisner

Neil L Gardner

Darrell R Krumme

Shih-Chang Chang

Joao Sergio Afonso

A method of manufacturing an integrated circuit includes forming first and second false collector regions of a first conductivity type adjacent to a surface of an epitaxial layer of semiconductor material. The first false collector region is located laterally on a first side of a base region. The base region is formed within the epitaxial layer and has a second conductivity type. The second false collector region is located laterally on a second side of the base region. The second side is opposite the first side of the base region. The base region is a base of a parasitic bipolar junction in an isolation region of an active semiconductor device.

False collectors and guard rings for semiconductor devices

In some examples, an integrated circuit includes an isolation layer disposed on or over a semiconductor substrate. The integrated circuit also includes a first conductive plate located over the isolation layer and a composite dielectric layer located over the first conductive plate. The composite dielectric layer includes a first sublayer comprising a first chemical composition; a second sublayer comprising a second different chemical composition; and a third sublayer comprising a third chemical composition substantially similar to the first chemical composition. The integrated circuit further includes a second conductive plate located directly on the composite dielectric layer above the first conductive plate.

Integrated circuits including composite dielectric layer

A method includes implanting dopant of a first conductivity type into an epitaxial layer of semiconductor material to form first and second false collector regions adjacent to the surface of the epitaxial layer. The first false collector region is located laterally on a first side of a base region. The base region is formed within the epitaxial layer from dopant of a second conductivity type that is opposite the first conductivity type. The second false collector region is located laterally on a second side of the base region. The second side is opposite the first side of the base region. The base region is a base of a parasitic bipolar junction in an isolation region of an active semiconductor device.

In some examples, an integrated circuit comprises a substrate; a first metal layer and a second metal layer positioned above the substrate; a first composite dielectric layer located on the first metal layer, wherein the first composite dielectric layer comprises a first anti-reflective coating; a second composite dielectric layer positioned on the second metal layer, wherein the second composite dielectric layer comprises a second anti-reflective coating; and a capacitor metal layer disposed over the first composite dielectric layer.

Integrated circuits having dielectric layers including an anti-reflective coating

In some examples, a method comprises: obtaining a substrate having at a metal interconnect layer deposited over the substrate; forming a first dielectric layer on the metal interconnect layer; forming a second dielectric layer on the first dielectric layer; forming a capacitor metal layer on the second dielectric layer; patterning and etching the capacitor metal layer and the second dielectric layer to the first dielectric layer to leave a portion of the capacitor metal layer and the second dielectric layer on the first dielectric layer; forming an anti-reflective coating to cover the portion of the capacitor metal layer and the second dielectric layer, and to cover the metal interconnect layer; and patterning the metal interconnect layer to form a first metal layer and a second metal layer.

Methods for etching metal interconnect layers

An integrated circuit (IC) includes a substrate and a first capacitor on the substrate. The first capacitor has a first width. A first dielectric layer is provided on a side of the first capacitor opposite the substrate. Further, a second capacitor is present on a side of the first dielectric layer opposite the first capacitor. The second capacitor has a second width that is smaller than the first width. The IC also has a second dielectric layer and a first metal layer. The second dielectric layer is on a side of the second capacitor opposite the first dielectric layer. The first metal layer is on a side of the second dielectric layer opposite the second capacitor.

Stacked capacitor

An integrated circuit includes a bipolar transistor, e.g. a back-ballasted NPN, that can conduct laterally and vertically. At a low voltage breakdown and low current conduction occur laterally near a substrate surface, while at a higher voltage vertical conduction occurs in a more highly-doped channel below the surface. A relatively high-resistance region at the surface has a low doping level to guide the conduction deeper into the collector.

Back ballasted vertical NPN transistor

In a described example, a bipolar junction transistor includes a substrate. An emitter region, a base region, and a collector region are each formed in the substrate. A gate-type structure is formed on the substrate between the base region and the emitter region. A contact is coupled to the gate-type structure, and the contact is adapted to be coupled to a source of DC voltage.

Bipolar junction transistor with biased structure between base and emitter regions

An integrated circuit includes an extended drain MOS transistor. The substrate of the integrated circuit has a lower layer with a first conductivity type. A drain well of the extended drain MOS transistor has the first conductivity type. The drain well is separated from the lower layer by a drain isolation well having a second, opposite, conductivity type. A source region of the extended drain MOS transistor is separated from the lower layer by a body well having the second conductivity type. Both the drain isolation well and the body well contact the lower layer. An average dopant density of the second conductivity type in the drain isolation well is less than an average dopant density of the second conductivity type in the body well.

Extended drain MOS with dual well isolation

An integrated circuit (IC) includes a second metal level located between first and third metal levels, a dielectric layer located over the metal levels, and first, second and third vias within the dielectric layer. The first via traverses the first dielectric layer from a surface of the dielectric layer to the first metal level and has a first diameter. The second via traverses the dielectric layer from the surface to the second metal level and has the first diameter. The third via traverses the dielectric layer from the surface to the third metal level and has a second diameter greater than the first diameter. In some implementations the first, second and third metal levels implement a capacitor.

IC with larger and smaller width contacts

Disclosed examples provide fabrications methods and integrated circuits with back ballasted NPN bipolar transistors which include an n-type emitter in a P doped region, a p-type base with a first side facing the emitter, and an n-type collector laterally spaced from a second side of the base, where the collector includes a first side facing the second side of the base, an opposite second side, a silicided first collector portion and a silicide blocked second collector portion covered with a non-conductive dielectric that extends laterally between the first collector portion and the second side of the collector to provide back side ballasting for lateral breakdown and low current conduction via a deep N doped region while the vertical NPN turns on at a high voltage.

An integrated circuit (IC) includes a semiconductor surface layer on a substrate including functional circuitry having circuit elements configured together with a metal-to-polysilicon capacitor on the semiconductor surface layer for realizing at least one circuit function. The metal-to-polysilicon capacitor includes a bottom plate including polysilicon, a capacitor dielectric including at least one capacitor dielectric layer on the bottom plate, a top plate on the capacitor dielectric, and contacts through a pre-metal dielectric layer that contact the top plate and contact the bottom plate. In lateral regions relative to the capacitor the capacitor dielectric layer has a thickness in a range between about 5% and about 50% of a thickness of the capacitor dielectric of the metal-to-polysilicon capacitor.

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Plano, TX, United States of America

Guruvayurappan Mathur