Media Lario S.r.l.

Photon Dynamics, Inc.

Gordon Yue

Giovanni Bianucci

Daniel G Stearns

Boris Grek

Natale Ceglio

Fabio E Zocchi

Robert David Banham

Richard Levesque

Giuseppe Valsecchi

Kent Nguyen

Neil Dang Nguyen

Marco Pedrali

Kiran Jitendra

Gian Luca Cassol

Steven Aochi

Lloyd Russell Jones

Dean Shough

Stefano Moretti

A probe system for facilitating inspection of a device under test comprising a plurality of panels, the probe system incorporating: a configurable universal probe bar comprising a plurality of probe blocks, the plurality of probe blocks comprising a plurality of probe pins positioned to simultaneously electrically engage a plurality of cell contact pads of the plurality of panels of the device under test to deliver a plurality of electrical test signals; and an alignment system configured to achieve an alignment of the plurality of probe pins with the plurality of the cell contact pads of the plurality of panels of the device under test.

Systems and methods for electrical inspection of flat panel displays using cell contact probing pads

Systems, assemblies and methods for thermally managing a grazing incidence collector (GIC) for EUV lithography applications are disclosed. The GIC thermal management assembly includes a GIC mirror shell interfaced with a jacket to form a sealed chamber. An open cell, heat transfer (OCHT) material is disposed within the metal chamber and is thermally and mechanically bonded with the GIC mirror shell and jacket. A coolant is flowed in an azimuthally symmetric fashion through the OCHT material between input and output plenums to effectuate cooling when the GIC thermal management assembly is used in a GIC mirror system configured to receive and form collected EUV radiation from an EUV radiation source.

Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography

A stress-decoupling device and methods of using same in a cooled grazing-incidence collector (GIC) mirror system are disclosed. A method includes providing a cooled GIC shell, providing input and output primary cooling-fluid manifolds, and fluidly connecting the cooled GIC shell to the input and output primary cooling-fluid manifolds through respective stress-decoupling devices. An exemplary stress-decoupling device includes inner and outer bellows that define a sealed cavity filled with a gas. An expansion-limiting member within the sealed cavity limits the expansion of the inner bellows due to the pressure of the cooling fluid flowing therethrough. The stress-decoupling device reduces or prevents the communication of stress from parts of the GIC mirror system to the GIC shells. Stress-decoupling systems and methods for a cooled spider as used in a GIC mirror system are also disclosed.

Stress-decoupling devices and methods for cooled mirror systems

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Sunnyvale, CA, United States of America

Gordon Yue