Burleigh Instruments, Inc.

Gordon M Shedd

Kevin J Owens

David J Ray

A support device for a scanned-probe microscope comprises a horizontal base member and a vertical bridge member that are transverse to one another. The horizontal and vertical members are connected at their respective opposite ends by a common chord member extending between the ends. The device preferably includes means for attaching a scanned-probe microscope to a forward surface of the vertical bridge member. The support device preferably further includes one or more bracket members, each attached at one end to the rearward surface of the vertical bridge member and at the opposite end to a rearward surface of the chord member. Each bracket includes a section extending away from the chord member. The horizontal base member and the chord member each has an upper surface substantially coplanar with one another. The substantially coplanar upper surfaces together provide support for a readily separable sample plate. Further in accordance with the invention, a microscope stage assembly comprises the described support device and a readily separable sample plate.

Support device and stage assembly for a scanned-probe microscope

The electrostrictive actuator device of the present invention, which controls relative movement in a scanned-probe microscope between the tip of a probe and the surface of a sample, comprises two thin-walled cylindrical members formed of electrostrictive material. The first cylindrical member, which is connected to the microscope, has on each of its inner and outer surfaces a conductive layer that forms at least one electrode. Applying voltages to the electrodes on the inner and outer surfaces of the first cylindrical member controls the two-dimensional X-Y horizontal relative movement between the probe tip and the sample surface. The second cylindrical member of the actuator device is coaxially connected at one end with the first cylindrical member and at its opposite end with the sample or the probe. Both the inner and outer surfaces of the second member have conductive layers, each of which forms an electrode. Applying voltages to the electrodes on the inner and outer surfaces of the second cylindrical member controls the Z-direction vertical relative movement of the probe tip on or near the sample surface. In preferred embodiments of the actuator device of the invention, either or both of the conductive layers on the inner and outer surfaces of the first cylindrical member may comprise two opposite pairs of spaced apart electrodes. Also in accordance with the invention, a scanned-probe microscope apparatus comprises a microscope and the just-described electrostrictive actuator device comprising first and second cylindrical members for controlling, respectively, X-Y horizontal and Z-direction vertical movements.

Growing community of inventors

Honeoye Falls, NY, United States of America

Gordon M Shedd