Motorola Corporation

Freescale Semiconductor,inc.

Everspin Technologies, Inc.

Gloria J Kerszykowski

Mark A Durlam

Saied N Tehrani

Eugene Youjun Chen

Kelly Wayne Kyler

Jon Michael Slaughter

Mark DeHerrera

Theodore Zhu

Loren J Wise

Nicholas David Rizzo

Peter K Naji

Eric John Salter

X Theodore Zhu

Thomas V Meixner

Mitchell T Lien

Li Hsin Chang

A method of manufacturing a magnetoelectronic device includes providing an electrically conducting material and an electrically insulating material adjacent to at least a portion of the electrically conducting material, and implanting a magnetic material into the electrically insulating material. The magnetic material increases the magnetic permeability of the electrically insulating material. The implant may be a blanket or a targeted implant.

Method of manufacturing a magnetoelectronic device

A magnetoresistive random access memory (MRAM) is embedded with another circuit type. Logic, such as a processing unit, is particularly well-suited circuit type for embedding with MRAM. The embedding is made more efficient by using a metal layer that is used as part of the interconnect for the other circuit also as part of the MRAM cell. The MRAM cells are all written by program lines, which are the two lines that cross to define a cell to be written. Thus, the design is simplified because there is commonality of usage of the metal line that is used for one of the program lines for the MRAM and for one of the interconnect lines for the logic.

MRAM device integrated with other types of circuitry

An improved and novel device and fabrication method for a magnetic element, and more particularly a magnetic element () including a first electrode (), a second electrode () and a spacer layer (). The first electrode () and the second electrode () include ferromagnetic layers (&). A spacer layer () is located between the ferromagnetic layer () of the first electrode () and the ferromagnetic layer () of the second electrode () for permitting tunneling current in a direction generally perpendicular to the ferromagnetic layers (&). The device includes insulative veils () characterized as electrically isolating the first electrode () and the second electrode (), the insulative veils () including non-magnetic and insulating dielectric properties. Additionally disclosed is a method of fabricating the magnetic element () with insulative veils () that have been transformed from having conductive properties to insulative properties through oxygen plasma ashing techniques.

Magnetic element with insulating veils and fabricating method thereof

An improved and novel device and fabrication method for a magnetic element, and more particularly a magnetic element ( ) including a first electrode ( ), a second electrode ( ) and a spacer layer ( ). The first electrode ( ) and the second electrode ( ) include ferromagnetic layers ( & ). A spacer layer ( ) is located between the ferromagnetic layer ( ) of the first electrode ( ) and the ferromagnetic layer ( ) of the second electrode ( ) for permitting tunneling current in a direction generally perpendicular to the ferromagnetic layers ( & ). The device includes insulative veils ( ) characterized as electrically isolating the first electrode ( ) and the second electrode ( ), the insulative veils ( ) including non-magnetic and insulating dielectric properties. Additionally disclosed is a method of fabricating the magnetic element ( ) with insulative veils ( ) that have been transformed from having conductive properties to insulative properties through oxygen plasma ashing techniques.

Method of fabricating a magnetic element with insulating veils

A method of fabricating an MRAM cell includes providing an isolation transistor on a semiconductor substrate and forming an interconnect stack on the substrate in communication with one terminal of the transistor. A via is formed on the upper end of the stack so as to extend from a position below the digit line to a position above the digit line. The via also extends above the upper surface of a dielectric layer to provide an alignment key. A MTJ memory cell is positioned on the upper surface in contact with the via, and the ends of a free layer of magnetic material are spaced from the ends of a pinned edge of magnetic material by using sidewall spacers and selective etching.

High density MRAM cell array

A method of fabricating a flux concentrator for use in magnetic memory devices including the steps of providing at least one magnetic memory bit (,) and forming proximate thereto a material stack defining a copper (Cu) damascene bit line (,) including a flux concentrating layer (,). The method includes the steps of depositing a bottom dielectric layer (,), an optional etch stop (,) layer, and a top dielectric layer (,) proximate the magnetic memory bit (,). A trench (,) is etched in the top dielectric layer (,) and the bottom dielectric layer (,). A first barrier layer (,) is deposited in the trench (,). Next, a metal system (,) is deposited on a surface of the first barrier layer (,). The metal system (,) includes a copper (Cu) seed material (,), and a plated copper (Cu) material (,), a first outside barrier layer (,), a flux concentrating layer (,), and a second outside barrier layer (,). The metal system (,) is patterned and etched to define a copper (Cu) damascene bit line (,).

Method of fabricating flux concentrating layer for use with magnetoresistive random access memories

An improved and novel MRAM device with magnetic memory elements and circuitry for controlling magnetic memory elements is provided. The circuitry, for example, transistor (,) having a gate (,), a drain (,) and a source (,) is integrated on a substrate (,) and coupled to a magnetic memory element (,) on the circuitry through a plug conductor (,) and a conductor line (,). The circuitry is fabricated first under the CMOS process and then magnetic memory elements (,). Digit line (,) and bit line (,) are placed under and on top of magnetic memory element (,), respectively, and enabled to access magnetic memory element (,). These lines are enclosed by a high permeability layer (,) excluding a surface facing magnetic memory element (,), which shields and focuses a magnetic field toward magnetic memory element (,).

Magnetic random access memory and fabricating method thereof

An improved and novel fabrication method for magnetoresistive random access memory (MRAM) is provided. An MRAM device has memory elements and circuitry for managing the memory elements. The circuitry includes transistor (12a), digit line (29), etc., which are integrated on a substrate (11). The circuitry is fabricated first under the CMOS process and then magnetic memory elements (53, 54). A dielectric layer (40, 41) is deposited on the circuit, and trenches (42, 43) are formed in the dielectric layer. A blanket layer (46), which includes magnetic layers (48, 49) and a non-magnetic layer (50) sandwiched by the magnetic layers, is deposited on dielectric layer (41) and in the trenches. Then, the blanket layer outside the trenches is removed and MRAM elements (53, 54) are formed in the trenches.

Method of fabricating a magnetic random access memory

An improved and novel MRAM device with magnetic memory elements and circuitry for controlling magnetic memory elements is provided. The circuitry, for example, transistor (12a) having a gate (17a), a drain (18) and a source (16a) is integrated on a substrate (11) and coupled to a magnetic memory element (43) on the circuitry through a plug conductor (19a) and a conductor line (45). The circuitry is fabricated first under the CMOS process and then magnetic memory elements (43, 44). Digit line (29) and bit line (48) are placed under and on top of magnetic memory element (43), respectively, and enabled to access magnetic memory element (43). These lines are enclosed by a high permeability layer (31, 56, 58) excluding a surface facing magnetic memory element (43), which shields and focuses a magnetic field toward magnetic memory element (43).

Growing community of inventors

Fountain Hills, AZ, United States of America

Gloria J Kerszykowski